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Compact NbN resonators with high kinetic inductance
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Xing-Yu Wei(魏兴雨), Jia-Zheng Pan(潘佳政), Ya-Peng Lu(卢亚鹏), Jun-Liang Jiang(江俊良), Zi-Shuo Li(李子硕), Sheng Lu(卢盛), Xue-Cou Tu(涂学凑), Qing-Yuan Zhao(赵清源), Xiao-Qing Jia(贾小氢), Lin Kang(康琳), Jian Chen(陈健), Chun-Hai Cao(曹春海), Hua-Bing Wang(王华兵), Wei-Wei Xu(许伟伟), Guo-Zhu Sun(孙国柱), and Pei-Heng Wu(吴培亨)
Chin. Phys. B, 2020, 29 (12):
128401.
DOI: 10.1088/1674-1056/abc2b8
We design and fabricate Λ/2 coplanar waveguide NbN resonators, the thickness and length of which are only several nanometers and hundred microns, respectively. The quality factor of such compact resonators can reach up to 7.5×104 at single photon power level at 30 mK with the resonance frequency around 6.835 GHz. In order to tune the resonant frequency, the resonator is terminated to the ground with a dc-SQUID. By tuning the magnetic flux in the dc-SQUID, the effective inductance of the dc-SQUID is varied, which leads to the change in the resonant frequency of the resonator. The tunability range is more than 30 MHz and the quality factor is about 3×103. These compact and tunable NbN resonators have potential applications in the quantum information processing, such as in the precision measurement, coupling and/or reading out the quantum states of qubits.
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