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Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si |
| Zhen-Zhuo Zhang(张臻琢)1,2, Jing Yang(杨静)1,†, De-Gang Zhao(赵德刚)1,3,‡, Feng Liang(梁锋)1, Ping Chen(陈平)1, and Zong-Shun Liu(刘宗顺)1 |
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China;
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China;
3 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
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Abstract GaN films grown on (111) Si substrate with different lattice parameters of the AlN buffer layer by metal-organic chemical vapor deposition are studied. The stress states obtained by different test methods are compared and it is found that the lattice parameter of the AlN buffer layer may have a significant effect on the stress state in the initial stage of subsequent GaN film growth. A larger compressive stress is beneficial to improved surface morphology and crystal quality of GaN film. The results of further orthogonal experiments show that an important factor affecting the lattice parameter is the growth rate of the AlN buffer layer. This work may be helpful for realizing simple GaN-on-Si structures and thus reducing the costs of growth processes.
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Received: 15 March 2022
Revised: 07 April 2022
Accepted manuscript online: 28 April 2022
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PACS:
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81.05.Ea
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(III-V semiconductors)
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81.15.Gh
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(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
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| Fund: Project supported by Beijing Municipal Science & Technology Commission, Administrative Commission of Zhongguancun Science Park (Grant Nos. Z211100007921022 and Z211100004821001), the National Natural Science Foundation of China (Grant Nos. 62034008, 62074142, 62074140, 61974162, 61904172, 61874175, 62127807, and U21B2061), Key Research and Development Program of Jiangsu Province (Grant No. BE2021008-1), Beijing Nova Program (Grant No. 202093), Strategic Priority Research Program of Chinese Academy of Sciences (Grant No. XDB43030101), and Youth Innovation Promotion Association of Chinese Academy of Sciences (Grant No. 2019115). |
Corresponding Authors:
Jing Yang, De-Gang Zhao
E-mail: yangjing333@semi.ac.cn;dgzhao@red.semi.ac.cn
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Cite this article:
Zhen-Zhuo Zhang(张臻琢), Jing Yang(杨静), De-Gang Zhao(赵德刚), Feng Liang(梁锋), Ping Chen(陈平), and Zong-Shun Liu(刘宗顺) Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si 2023 Chin. Phys. B 32 028101
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