1 State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;
2 State Key Laboratory of Integrated Optoelectronics, Institute of Electronic Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
In this work, a dual-side parabolic structural (DSPS) multimode interference (MMI) thermo-optic (TO) waveguide switch is designed and fabricated by using novel low-loss fluorinated photopolymer materials. Comparing with the traditional dual-side linear structural (DSLS) MMI device, the effective length of the MMI coupling region proposed can be effectively reduced by 40%. The thermal stability of the waveguide material is analyzed, and the optical characteristics of the switching chip are simulated. The actual performances of the entire MMI switch are measured with an insertion loss of 7 dB, switching power of 15 mW and an extinction ratio of 28 dB. In contrast to the traditional MMI optical switch, the new type of parabolic structural MMI TO waveguide switch exhibits lower power consumption and larger extinction ratio. The compact fluorinated polymer MMI TO switches are suitable well for realizing miniaturization, high-properties, and lower cost of photonic integrated circuits.
Project supported by the National Key Research and Development Program of China (Grant No. 2016YFB0402502), the National Natural Science Foundation of China (Grant Nos. 61575076, 61475061, 61605057, and 61675087), and the Jilin Provincial Industrial Innovation Special Fund Project, China (Grant No. 2016C019).
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