Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode
Tao Ma(马涛)1,2,†, Yong-Sheng Tian(田永生)1, Shao-Hui Liu(刘少晖)1, Jia-He Ma(马家赫)1, Heng Liu(刘恒)1,3, and Fang Wang(王芳)1,2
1 College of Electronic and Electrical Engineering, Henan Normal University, Xinxiang 453007, China; 2 Henan Key Laboratory of Optoelectronic Sensing Integrated Application, Xinxiang 453007, China; 3 Academician Workstation of Electromagnetic Wave Engineering of Henan Province, Xinxiang 453007, China
Abstract A biological sensing structure with a high-order mode () is designed, which is composed of a suspended racetrack micro-resonator (SRTMR) and a microfluidic channel. The mode characteristics, coupling properties, and sensing performances are simulated by using the finite element method (FEM). To analyze the mode confinement property, the confinement factors in the core and cladding of the suspended waveguide for the , , and are calculated. The simulation results show that the refractive index (RI) sensitivity of the proposed sensing structure can be improved by using the high-order mode (). The RI sensitivity for the mode is ～ 201 nm/RIU, which is twice to thrice higher than those for the mode and the mode. Considering a commercial spectrometer, the proposed sensing structure based on the SRTMR achieves a limit of detection (LOD) of ～ 4.7×10-6 RIU. Combined with the microfluidic channel, the SRTMR can possess wide applications in the clinical diagnostic assays and biochemical detections.
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 62075057) and Ph. D. Program of Henan Normal University, China (Grant Nos. 5101239170010 and gd17167).
Corresponding Authors:
Tao Ma
E-mail: matao@htu.edu.cn
Cite this article:
Tao Ma(马涛), Yong-Sheng Tian(田永生), Shao-Hui Liu(刘少晖), Jia-He Ma(马家赫), Heng Liu(刘恒), and Fang Wang(王芳) Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode 2021 Chin. Phys. B 30 114208
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