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Effect of gate length on breakdown voltage in AlGaN/GaN high-electron-mobility transistor |
Jun Luo(罗俊)1, Sheng-Lei Zhao(赵胜雷)1, Min-Han Mi(宓珉瀚)1, Wei-Wei Chen(陈伟伟)2, Bin Hou(侯斌)2, Jin-Cheng Zhang(张进成)1, Xiao-Hua Ma(马晓华)1,2, Yue Hao(郝跃)1 |
1. Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China; 2. School of Advanced Materials and Nanotechnology, Xidian University, Xi'an 710071, China |
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Abstract The effects of gate length LG on breakdown voltage VBR are investigated in AlGaN/GaN high-electron-mobility transistors (HEMTs) with LG = 1 μm~ 20 μm. With the increase of LG, VBR is first increased, and then saturated at LG=3 μm. For the HEMT with LG=1 μm, breakdown voltage VBR is 117 V, and it can be enhanced to 148 V for the HEMT with LG = 3 μm. The gate length of 3 μm can alleviate the buffer-leakage-induced impact ionization compared with the gate length of 1 μm, and the suppression of the impact ionization is the reason for improving the breakdown voltage. A similar suppression of the impact ionization exists in the HEMTs with LG>3 μm. As a result, there is no obvious difference in breakdown voltage among the HEMTs with LG = 3 μm~ 20 μm, and their breakdown voltages are in a range of 140 V-156 V.
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Received: 15 August 2015
Revised: 02 October 2015
Accepted manuscript online:
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PACS:
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73.40.Kp
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(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)
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73.61.Ey
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(III-V semiconductors)
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78.30.Fs
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(III-V and II-VI semiconductors)
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Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61334002, 61106106, and 61204085). |
Corresponding Authors:
Yue Hao
E-mail: yhao@xidian.edu.cn
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Cite this article:
Jun Luo(罗俊), Sheng-Lei Zhao(赵胜雷), Min-Han Mi(宓珉瀚), Wei-Wei Chen(陈伟伟), Bin Hou(侯斌), Jin-Cheng Zhang(张进成), Xiao-Hua Ma(马晓华), Yue Hao(郝跃) Effect of gate length on breakdown voltage in AlGaN/GaN high-electron-mobility transistor 2016 Chin. Phys. B 25 027303
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