CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Threshold switching uniformity in In2Se3 nanowire-based phase change memory |
Chen Jian (陈键)a b, Du Gang (杜刚)b, Liu Xiao-Yan (刘晓彦)b |
a Shenzhen Graduate School, Peking University, Shenzhen 518055, China; b Institute of Microelectronics, Peking University, Beijing 100871, China |
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Abstract The uniformity of threshold voltage and threshold current in the In2Se3 nanowire-based phase change memory (PCM) devices is investigated. Based on the trap-limited transport model, amorphous layer thickness, trap density, and trap depth are considered to clarify their influences upon the threshold voltage and threshold current through simulations.
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Received: 14 November 2014
Revised: 09 December 2014
Accepted manuscript online:
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PACS:
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77.80.Fm
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(Switching phenomena)
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85.30.-z
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(Semiconductor devices)
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78.66.Jg
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(Amorphous semiconductors; glasses)
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85.30.-z
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(Semiconductor devices)
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Fund: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00604). |
Corresponding Authors:
Liu Xiao-Yan
E-mail: xyliu@ime.pku.edu.cn
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About author: 77.80.Fm; 85.30.-z; 78.66.Jg; 85.30.-z |
Cite this article:
Chen Jian (陈键), Du Gang (杜刚), Liu Xiao-Yan (刘晓彦) Threshold switching uniformity in In2Se3 nanowire-based phase change memory 2015 Chin. Phys. B 24 057702
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