Influences of different oxidants on characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition

doi:10.1088/1674-1056/26/6/067701

Abstract

A comparative study of two kinds of oxidants (H₂O and O₃) with the combination of two metal precursors (TMA and La(ⁱPrCp)₃) for atomic layer deposition (ALD) La₂O₃/Al₂O₃ nanolaminates is carried out. The effects of different oxidants on the physical properties and electrical characteristics of La₂O₃/Al₂O₃ nanolaminates are studied. Initial testing results indicate that La₂O₃/Al₂O₃ nanolaminates could avoid moisture absorption in the air after thermal annealing. However, moisture absorption occurs in H₂O-based La₂O₃/Al₂O₃ nanolaminates due to the residue hydroxyl/hydrogen groups during annealing. As a result, roughness enhancement, band offset variation, low dielectric constant and poor electrical characteristics are measured because the properties of H₂O-based La₂O₃/Al₂O₃ nanolaminates are deteriorated. Addition thermal annealing effects on the properties of O₃-based La₂O₃/Al₂O₃ nanolaminates indicate that O₃ is a more appropriate oxidant to deposit La₂O₃/Al₂O₃ nanolaminates for electron devices application.

Keywords: La₂O₃/Al₂O₃nanolaminates atomic layer deposition oxidants annealing

Received: 30 November 2016
Revised: 27 February 2017
Accepted manuscript online:

PACS:	77.55.D-
	82.80.Pv	(Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.))

Fund:

Project supported by the National Natural Science Foundation of China (Grant Nos. 61604016 and 51501017) and the Fundamental Research Funds for the Central Universities, China (Grant No. 310831161003).

Corresponding Authors: Ji-Bin Fan
E-mail: jbfan@chd.edu.cn

Cite this article:

Ji-Bin Fan(樊继斌), Hong-Xia Liu(刘红侠), Li Duan(段理), Yan Zhang(张研), Xiao-Chen Yu(于晓晨) Influences of different oxidants on characteristics of La₂O₃/Al₂O₃ nanolaminates deposited by atomic layer deposition 2017 Chin. Phys. B 26 067701

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Influences of different oxidants on characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition

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Influences of different oxidants on characteristics of La₂O₃/Al₂O₃ nanolaminates deposited by atomic layer deposition