1 Department of Material Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China; 2 Collaborative Innovation Center of Advanced Steel Technology, University of Science and Technology Beijing, Beijing 100083, China; 3 Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China; 4 National Institute of Metrology, Beijing 100029, China
Abstract A well-established method is highly desirable for growing topological insulator thin films with low carrier density on a wafer-level scale. Here, we present a simple, scalable method based on magnetron sputtering to obtain high-quality Bi2Te3 films with the carrier density down to 4.0×1013 cm-2. In contrast to the most-used method of high substrate temperature growth, we firstly sputtered Bi2Te3 thin films at room temperature and then applied post-annealing. It enables the growth of highly-oriented Bi2Te3 thin films with larger grain size and smoother interface. The results of electrical transport show that it has a lower carrier density as well as a larger coherent length (~228 nm, 2 K). Our studies pave the way toward large-scale, cost-effective production of Bi2Te3 thin films to be integrated with other materials in wafer-level scale for electronic and spintronic applications.
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 52072030, 52071025, and 51871018), the Beijing Outstanding Young Scientists Projects (Grant No. BJJWZYJH01201910005018), Beijing Natural Science Foundation, China (Grant No. Z180014), the Science and Technology Innovation Team Program of Foshan (Grant No. FSOAA-KJ919-4402-0087), and Beijing Laboratory of Metallic Materials and Processing for Modern Transportation.
Corresponding Authors:
Zhen-Dong Zhu, Jiao Teng
E-mail: zd_tsu@163.com;tengjiao@mater.ustb.edu.cn
Cite this article:
Qi-Xun Guo(郭奇勋), Zhong-Xu Ren(任中旭), Yi-Ya Huang(黄意雅), Zhi-Chao Zheng(郑志超), Xue-Min Wang(王学敏), Wei He(何为), Zhen-Dong Zhu(朱振东), and Jiao Teng(滕蛟) Effects of post-annealing on crystalline and transport properties of Bi2Te3 thin films 2021 Chin. Phys. B 30 067307
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