Investigation of Ga2O3/diamond heterostructure solar-blind avalanche photodiode via TCAD simulation

doi:10.1088/1674-1056/acc44d

Abstract A Ga₂O₃/diamond separate absorption and multiplication avalanche photodiode (SAM-APD) with mesa structure has been proposed and simulated. The simulation is based on an optimized Ga₂O₃/diamond heterostructure TCAD physical model, which is revised by repeated comparison with the experimental data from the literature. Since both Ga₂O₃ and diamond are ultra-wide bandgap semiconductor materials, the Ga₂O₃/diamond SAM-APD shows good solar-blind detection ability, and the corresponding cutoff wavelength is about 263 nm. The doping distribution and the electric field distribution of the SAM-APD are discussed, and the simulation results show that the gain of the designed device can reach 5×10⁴ and the peak responsivity can reach a value as high as 78 A/W.

Keywords: Ga₂O₃ diamond separate absorption and multiplication avalanche photodiode (SAM-APD) solar-blind detector

Received: 07 November 2022
Revised: 07 February 2023
Accepted manuscript online: 15 March 2023

PACS:	85.60.-q	(Optoelectronic devices)
	85.30.-z	(Semiconductor devices)
	85.30.De	(Semiconductor-device characterization, design, and modeling)
	85.30.Mn	(Junction breakdown and tunneling devices (including resonance tunneling devices))

Fund: Project supported by the National Key Research and Development Program of China (Grant No. 2022YFB3608602), the Beijing Municipal Science and Technology Commission (Grant No. Z181100004418009), and the National Natural Science Foundation of China (Grant No. 61927806).

Corresponding Authors: Peng Jin
E-mail: pengjin@semi.ac.cn

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Dun-Zhou Xu(许敦洲), Peng Jin(金鹏), Peng-Fei Xu(徐鹏飞), Meng-Yang Feng(冯梦阳), Ju Wu(吴巨), and Zhan-Guo Wang(王占国) Investigation of Ga₂O₃/diamond heterostructure solar-blind avalanche photodiode via TCAD simulation 2023 Chin. Phys. B 32 108504

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Investigation of Ga2O3/diamond heterostructure solar-blind avalanche photodiode via TCAD simulation

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Investigation of Ga₂O₃/diamond heterostructure solar-blind avalanche photodiode via TCAD simulation