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Effects of oxygen/nitrogen co-incorporation on regulation of growth and properties of boron-doped diamond films |
| Dong-Yang Liu(刘东阳)1,2, Kun Tang(汤琨)1,3,†, Shun-Ming Zhu(朱顺明)1,3, Rong Zhang(张荣)1,3, You-Dou Zheng(郑有炓)1,3, and Shu-Lin Gu(顾书林)1,3,‡ |
1 School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China;
2 The Shanghai Huahong Grace Semiconductor Manufacturing Corporation, Shanghai 201203, China;
3 Collaborative Innovation Center of Solid-State Lighting and Energy-Saving Electronics, Nanjing University, Nanjing 210093, China |
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Abstract Regulation with nitrogen and oxygen co-doping on growth and properties of boron doped diamond films is studied by using laughing gas as dopant. As the concentration of laughing gas (N2O/C) increases from 0 to 10%, the growth rate of diamond film decreases gradually, and the nitrogen-vacancy (NV) center luminescence intensity increases first and then weakens. The results show that oxygen in laughing gas has a strong inhibitory effect on formation of NV centers, and the inhibitory effect would be stronger as the concentration of laughing gas increases. As a result, the film growth rate and nitrogen-related compensation donor decrease, beneficial to increase the acceptor concentration (～3.2× 1019 cm-3) in the film. Moreover, it is found that the optimal regulation with the quality and electrical properties of boron doped diamond films could be realized by adding appropriate laughing gas, especially the hole mobility (～700 cm2/V·s), which is beneficial to the realization of high-quality boron doped diamond films and high-level optoelectronic device applications in the future.
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Received: 06 May 2023
Revised: 05 July 2023
Accepted manuscript online: 06 July 2023
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PACS:
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81.05.ug
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(Diamond)
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81.15.-z
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(Methods of deposition of films and coatings; film growth and epitaxy)
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61.72.-y
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(Defects and impurities in crystals; microstructure)
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| Fund: Project supported by the National Key R&D Program of China (Grant Nos. 2018YFB0406502, 2017YFF0210800, and 2017YFB0403003), the National Natural Science Foundation of China (Grant Nos. 61974059, 61674077, and 61774081), the Natural Science Foundation of Jiangsu Province (Grant No. BK20160065), and the Fundamental Research Funds for the Central Universities. |
Corresponding Authors:
Kun Tang, Shu-Lin Gu
E-mail: ktang@nju.edu.cn;slgu@nju.edu.cn
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Cite this article:
Dong-Yang Liu(刘东阳), Kun Tang(汤琨), Shun-Ming Zhu(朱顺明), Rong Zhang(张荣), You-Dou Zheng(郑有炓), and Shu-Lin Gu(顾书林) Effects of oxygen/nitrogen co-incorporation on regulation of growth and properties of boron-doped diamond films 2023 Chin. Phys. B 32 118102
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