1 State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing 100084, China; 2 Frontier Science Center for Quantum Information, Beijing 100084, China; 3 Beijing Institute of Quantum Information Science, Beijing 100193, China
Abstract The inherent fragility and surface/interface-sensitivity of quantum devices demand fabrication techniques under very clean environment. Here, I briefly introduces several techniques based on molecular beam epitaxy growth on pre-patterned substrates which enable us to directly prepare in-plane nanostructures and heterostructures in ultrahigh vacuum. The molecular beam epitaxy-based fabrication techniques are especially useful in constructing the high-quality devices and circuits for solid-state quantum computing in a scalable way.
(Quantum computation architectures and implementations)
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 92065206).
Corresponding Authors:
Ke He
E-mail: kehe@tsinghua.edu.cn
Cite this article:
Ke He(何珂) Molecular beam epitaxy growth of quantum devices 2022 Chin. Phys. B 31 126804
[1] Kroemer H 2001 Rev. Mod. Phys.73 783 [2] Fiori G, Bonaccorso F, Iannaccone G, Palacios T, Neumaier D, Seabaugh A, Banerjee S K and Colombo L 2014 Nat. Nanotechnol.9 768 [3] Ge C H, Li H L, Zhu X L and Pan A L 2017 Chin. Phys. B26 034208 [4] Hasan M Z and Kane C L 2010 Rev. Mod. Phys.82 3045 [5] Qi X L and Zhang S C 2011 Rev. Mod. Phys.83 1057 [6] Heinini M 2018 Molecular Beam Epitaxy From Research to Mass Production (Elsevier) [7] Barth J V, Costantini G and Kern K 2005 Nature437 671 [8] Qin Z H 2013 Chin. Phys. B22 098108 [9] Krizek F, Sestoft J E, Aseev P, Marti-Sanchez S, Vaitiekėnas S, Casparis L, Khan S A, Liu Y, Stankevič T, Whiticar A M, Fursina A, Boekhout F, Koops R, Uccelli E, Kouwenhoven L P, Marcus C M, Arbiol J and Krogstrup P 2018 Phys. Rev. Materials2 093401 [10] Vaitiekėnas S, Whiticar A M, Deng M T, Krizek F, Sestoft J E, Palmstrom C J, Marti-Sanchez S, Arbiol J, Krogstrup P, Casparis L and Marcus C M 2018 Phys. Rev. Lett.121 147701 [11] Friedl M, Cerveny K, Weigele P, Tütüncüoglu G, Martí-Sánchez S, Huang C, Patlatiuk T, Potts H, Sun Z, Hill M O, Güniat L, Kim W, Zamani M, Dubrovskii V G, Arbiol J, Lauhon L J, Zumbühl D M and Fontcuberta I Morral A 2018 Nano Lett.18 2666 [12] Lee J S, Choi S, Pendharkar M, Pennachio D J, Markman B, Seas M, Koelling S, Verheijen M A, Casparis L, Petersson K D, Petkovic I, Schaller V, Rodwell M J W, Marcus C M, Krogstrup P, Kouwenhoven L P, Bakkers E P A M and Palmstrom C J 2019 Phys. Rev. Materials3 084606 [13] Aseev P, Fursina A, Boekhout F, Krizek F, Sestoft J E, Borsoi F, Heedt S, Wang G, Binci L, Martí-Sánchez S, Swoboda T, Koops R, Uccelli E, Arbiol J, Krogstrup P, Kouwenhoven L P and Caroff P 2019 Nano Lett.19 218 [14] Desplanque L, Bucamp A, Troadec D, Patriarche G and Wallart X 2018 Nanotechnology29 305705 [15] Op het Veld R L M, Xu D, Schaller V, Verheijen M A, Peters S M E, Jung J, Tong C, Wang Q, de Moor M W A, Hesselmann B, Vermeulen K, Bommer J D S, Sue Lee J, Sarikov A, Pendharkar M, Marzegalli A, Koelling S, Kouwenhoven L P, Miglio L, Palmstrom C J, Zhang H and Bakkers E P A M 2020 Commun. Phys.3 59 [16] Jung J, Op het Veld R L M, Benoist R, Molen O A H, Manders C, Verheijen M A and Bakkers E P A M 2021 Adv. Funct. Mater.31 2103062 [17] Schüffelgen P, Rosenbach D, Li C, Schmitt T W, Schleenvoigt M, Jalil A R, Schmitt S, Kölzer J, Wang M, Bennemann B, Parlak U, Kibkalo L, Trellenkamp S, Grap T, Meertens D, Luysberg M, Mussler G, Berenschot E, Tas N, Golubov A A, Brinkman A, Schäpers T and Grützmacher D 2019 Nat. Nanotechnol.14 825 [18] Yuan X, Pan D, Zhou Y, Zhang X, Peng K, Zhao B, Deng M, He J, Tan H H and Jagadish C 2021 Appl. Phys. Rev.8 021302 [19] Lutchyn R M, Sau J D and Das Sarma S 2010 Phys. Rev. Lett.105 077001 [20] Oreg Y, Refael G and von Oppen F 2010 Phys. Rev. Lett.105 177002 [21] Plugge S, Rasmussen A, Egger R and Flensberg K 2017 New J. Phys.19 012001 [22] Karzig T, Knapp C, Lutchyn R M, Bonderson P, Hastings M B, Nayak C, Alicea J, Flensberg K, Plugge S, Oreg Y, Marcus C M and Freedman M H 2017 Phys. Rev. B95 235305 [23] Lutchyn R M, Bakkers E P A M, Kouwenhoven L P, Krogstrup P, Marcus C M and Oreg Y 2018 Nat. Rev. Mater.3 52 [24] Aguado R and Kouwenhoven L P 2020 Physics Today73 44 [25] Cao Z, Chen S, Zhang G and Liu D E 2022 arXiv: 2206.06916 [26] Joyce B D and Baldrey J A 1962 Nature195 485 [27] Yang W Y, Li Y J, Meng F Y, Yu H Y, Wang M Q, Wang P F, Luo G Z, Zhou X L and Pan J Q 2020 J. Semicond.40 101305 [28] Cao Z, Liu D E, He W-X, Liu X, He K and Zhang H 2022 Phys. Rev. B105 085424 [29] Jiang Y, Yang S, Li L, Song W, Miao W, Tong B, Geng Z, Gao Y, Li R, Chen F, Zhang Q, Meng F, Gu L, Zhu K, Zang Y, Shang R, Cao Z, Feng X, Xue Q-K, Liu D E, Zhang H and He K 2022 Phys. Rev. Materials6 034205 [30] Geng Z, Zhang Z, Chen F, Yang S, Jiang Y, Gao Y, Tong B, Song W, Miao W, Li R, Wang Y, Zhang Q, Meng F, Gu L, Zhu K, Zang Y, Li L, Shang R, Feng X, Xue Q K, He K and Zhang H 2022 Phys. Rev. B105 L241112 [31] Kiczynski M, Gorman S K, Geng H, Donnelly M B, Chung Y, He Y, Keizer J G and Simmons M Y 2022 Nature606 694 [32] Rueß F J, Pok W, Reusch T C G, Butcher M J, Goh K E J, Oberbeck L, Scappucci G, Hamilton A R and Simmons M Y 2007 Small3 563 [33] Dolan G J 1977 Appl. Phys. Lett.31 337 [34] Carrad D J, Bjergfelt M, Kanne T, Aagesen M, Krizek F, Fiordaliso E M, Johnson E, Nygård J and Jespersen T S 2020 Adv. Mater.32 1908411
[1]
Strain compensated type II superlattices grown by molecular beam epitaxy Chao Ning(宁超), Tian Yu(于天), Rui-Xuan Sun(孙瑞轩), Shu-Man Liu(刘舒曼), Xiao-Ling Ye(叶小玲), Ning Zhuo(卓宁), Li-Jun Wang(王利军), Jun-Qi Liu(刘俊岐), Jin-Chuan Zhang(张锦川), Shen-Qiang Zhai(翟慎强), and Feng-Qi Liu(刘峰奇). Chin. Phys. B, 2023, 32(4): 046802.
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