High efficiency, large-active-area superconducting nanowire single-photon detectors
Gu Min (顾敏)a, Zhang La-Bao (张蜡宝)a, Kang Lin (康琳)a, Zhao Qing-Yuan (赵清源)a, Jia Tao (郏涛)a, Wan Chao (万超)a, Xu Rui-Ying (徐睿莹)a, Yang Xiao-Zhong (杨小忠)a, Wu Pei-Heng (吴培亨)a, Zhang Yong (张永)b, Xia Jin-Song (夏金松)b
a Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering,Nanjing University, Nanjing 210093, China;
b Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information,Huazhong University of Science and Technology, Wuhan 430074, China
Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm × 30 μm. To achieve non-constricted detectors, we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide NbN nanowires with a fill factor of 50%. The devices showed 72.4% system detection efficiency (SDE) at 100-Hz dark count rate (DCR) and 74-ps timing jitter, measured at the fiber communication wavelength of 1550 nm. The highest SDE which is 81.2% when the DCR is ～700 c/s appears at the wavelength of 1650 nm.
(Photodetectors (including infrared and CCD detectors))
Corresponding Authors:
Kang Lin
E-mail: kanglin@nju.edu.cn
About author: 85.25.Pb; 07.57.Kp; 85.60.Gz
Cite this article:
Gu Min (顾敏), Zhang La-Bao (张蜡宝), Kang Lin (康琳), Zhao Qing-Yuan (赵清源), Jia Tao (郏涛), Wan Chao (万超), Xu Rui-Ying (徐睿莹), Yang Xiao-Zhong (杨小忠), Wu Pei-Heng (吴培亨), Zhang Yong (张永), Xia Jin-Song (夏金松) High efficiency, large-active-area superconducting nanowire single-photon detectors 2015 Chin. Phys. B 24 068501
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