Abstract The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional (2D) theory, which gives relatively low diffusion coefficient during deposition. The annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role. The surface roughness increases with the increase of grain size.
(Phase diagrams and microstructures developed by solidification and solid-solid phase transformations)
Fund: Project supported by the National Basic Research Program of China (Grant No. 2006CB91304), and the Knowledge Innovation Program of the Chinese Academy of Sciences.
Cite this article:
Zhang Xin(张鑫), Song Xiao-Hui(宋小会), and Zhang Dian-Lin(张殿琳) Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films 2010 Chin. Phys. B 19 086802
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