INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Prev
Next
|
|
|
High performance silicon waveguide germanium photodetector |
Li Chong (李冲)a b, Xue Chun-Lai (薛春来)a, Li Ya-Ming (李亚明)a, Li Chuan-Bo (李传波)a, Cheng Bu-Wen (成步文)a, Wang Qi-Ming (王启明)a |
a State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
b School of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China |
|
|
Abstract High-performance Ge-on-SOI p-i-n waveguide photodetectors with different sizes were fabricated. The performances, in terms of dark-current, photo current responsivity and 3-dB bandwidth, were well studied. A responsivity of 0.842 A/W at 1550 nm and dark current of 70 nA was measured from this detector at -1 V. The detector with a size of 4 μm× 10 μm demonstrated an optical band width of 19 GHz at -5 V for 1550 nm. Both the experimental results and the finite-difference time domain simulation show that, when the device size is above a certain threshold, the absorption is not sensitively dependent on such designing parameters as the width and length of the photodetector.
|
Received: 28 April 2014
Revised: 28 September 2014
Accepted manuscript online:
|
PACS:
|
85.60.Gz
|
(Photodetectors (including infrared and CCD detectors))
|
|
95.55.Aq
|
(Charge-coupled devices, image detectors, and IR detector arrays)
|
|
85.30.De
|
(Semiconductor-device characterization, design, and modeling)
|
|
Corresponding Authors:
Li Chong
E-mail: chli@semi.ac.cn
|
Cite this article:
Li Chong (李冲), Xue Chun-Lai (薛春来), Li Ya-Ming (李亚明), Li Chuan-Bo (李传波), Cheng Bu-Wen (成步文), Wang Qi-Ming (王启明) High performance silicon waveguide germanium photodetector 2015 Chin. Phys. B 24 038502
|
[1] |
Wang J, Loh W Y, Chua K T, Zang H, Xiong Y Z, Loh T H, Yu M B, LeeS J, Lo G Q and Kwong D L 2008 IEEE Electron Device Lett. 29 445
|
[2] |
Feng N N, Liao S, Dong P, Zheng D, Liang H, Kung C C, Shafiiha R, Feng D, Li G L, Cunningham John E, Krishnamoorthy A V and Asghari M 2010 Proc. SPIE 7607 760704
|
[3] |
Park S, Tsuchizawa T, Watanabe T, Shinojima H, Nishi H, Yamada K, Ishikawa Y, Wada K and Itabashi S 2010 Opt. Express 18 8412
|
[4] |
Tu Z, Liu K, Yi H, Zhou R, Wang X, Zhou Z and Chen Z 2012 Proc. SPIE 8564 85646
|
[5] |
Michel J, Liu J and Kimerling L C 2010 Nat. Photon. 4 527
|
[6] |
Xue C, Xue H and Cheng B 2009 J. Lightwave Technol. 27 5687
|
[7] |
Li C, Xue C, Liu Z, Cheng B, Li C and Wang Q 2013 IEEE Trans. Electron Dev. 60 1183
|
[8] |
Giovane L M, Luan H C, Agarwal A M and Kimerling L C 2001 Appl. Phys. Lett. 78 541
|
[9] |
Liu Z, Cheng B, Li Y M, Li C B, Xue C L and Wang Q M 2013 Chin. Phys. B 22 116804
|
[10] |
Mitsuru T, Kiyohito M, Masakazu S, Yoshiaki N and Shinichi T 2012 Opt. Express 20 8718
|
[11] |
Sze S M and Kwok N G 2007 Physics of Semiconductor Device (New Jersey: John Wiley & Sons, Inc)
|
[12] |
Going R, Kim M and Wu M C 2013 Opt. Express 21 22429
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|