INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Prev
Next
|
|
|
A novel integrated ultraviolet photodetector based on standard CMOS process |
Wang Han (汪涵)a b, Jin Xiang-Liang (金湘亮)a b, Chen Chang-Ping (陈长平)a b, Tian Man-Fang (田满芳)a b, Zhu Ke-Han (朱柯翰)c |
a Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan 411105, China; b Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip, Xiangtan 411105, China; c Electrical and Computer Engineering Department, Boise State University, Boise 83725 (208), USA |
|
|
Abstract A novel integrated ultraviolet (UV) photodetector has been proposed, which realizes a high UV selectivity by combining a conventional UV-selective photodiode with an extra infrared (IR) photodiode. The IR photodiode is designed for compensating the photocurrent response of the UV photodiode in the infrared band and is 15 times smaller than the UV one. The integrated photodetector has been fabricated in a 0.35 μm standard CMOS technology. Some critical performance indices of this new structure photodetector, such as spectral responsivity, breakdown voltage, quenching waveform, and transient response, are measured and analyzed. Test results show that the complementary UV-IR photodetector has a maximum spectral responsivity of 0.27 A · W-1 at the wavelength of 400 nm. The device has a high UV selectivity of 3000, which is much higher than that of the single UV photodiode.
|
Received: 10 August 2014
Revised: 13 October 2014
Accepted manuscript online:
|
PACS:
|
85.30.De
|
(Semiconductor-device characterization, design, and modeling)
|
|
85.30.Tv
|
(Field effect devices)
|
|
85.30.-z
|
(Semiconductor devices)
|
|
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61274043), the Key Project of the Ministry of Education of China (Grant No. 212125), and the State Key Program of the National Natural Science Foundation of China (Grant No. 61233010). |
Corresponding Authors:
Jin Xiang-Liang
E-mail: jinxl@xtu.edu.cn
|
Cite this article:
Wang Han (汪涵), Jin Xiang-Liang (金湘亮), Chen Chang-Ping (陈长平), Tian Man-Fang (田满芳), Zhu Ke-Han (朱柯翰) A novel integrated ultraviolet photodetector based on standard CMOS process 2015 Chin. Phys. B 24 038501
|
[1] |
Li D D, Luo Z S, Mou W S, Wang Y S, Ying T J and Mao L C 2014 Postharvest Biology and Technology 90 56
|
[2] |
Krzyscin J W, Jarosawski J and Rajewska-Wich B 2012 Journal of Photochemistry and Photobiology 117 240
|
[3] |
Xu F and Zhang X 2013 Procedia Engineering 52 489
|
[4] |
Pauchard A R, Manic D, Flanagan A and Besse P A 2000 IEEE Transactions on Industrial Electronics 2 168
|
[5] |
Perialea L and Peskov V 2007 Nuclear Instruments and Methods in Physics Research 572 189
|
[6] |
Zhu H, Shan C X and Yao B 2008 Phys. Chem. 112 20546
|
[7] |
Guo X Y, Rowland L B and Dunne G T 2006 IEEE Photon. Tech. Lett. 18 136
|
[8] |
Li C, Xue C L, Liu Z, Cheng B W and Wang Q M 2014 Chin. Phys. B 23 038507
|
[9] |
Weng W Y, Hsueh T J, Chang S J and Wang S B 2011 Selected Topics in Quantum Electronics 17 996
|
[10] |
Li C, Xue C L, Liu Z, Cheng B W, Li C B and Wang Q M 2014 Chin. Phys. B 23 038506
|
[11] |
Pauchard A, Besse P A and Popovic R S 1999 Sens. Actuators 76 172
|
[12] |
Yin C S 1991 IEEE Electron Device Lett. 12 442
|
[13] |
Ghazi A, Zimmermann H and Seegebrecht P 2002 Electron Devices 49 1124
|
[14] |
Shi L, Sarubbi F, Nanver L K and Kroth U 2010 Procedia Engineering 5 633
|
[15] |
Guike L, Peng F and Nanjian W 2011 Journal of Semiconductors 32 105008 (in Chinese)
|
[16] |
Chen C P, Wang H, Jiang Z Y, Jin X L and Luo J 2014 Photonic Sensors 4 373
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|