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Chinese Physics, 2006, Vol. 15(11): 2697-2705    DOI: 10.1088/1009-1963/15/11/039
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Preparation and tribological properties of DLC/Ti filmby pulsed laser arc deposition

Zhang Zhen-Yu(张振宇), Lu Xin-Chun(路新春), Luo Jian-Bin(雒建斌), Shao Tian-Min(劭天敏), Qing Tao(卿涛), and Zhang Chen-Hui(张晨辉)
State Key Laboratory of Tribology, Tsinghua University, Beijing100084, China
Abstract  This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with $I(D)/I(G)$ 0.28 and corresponding to 76%sp$^{3}$ content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at%content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46~nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.
Keywords:  diamond like carbon      tribological property      pulsed laser arc deposition      Raman spectroscopy  
Received:  05 January 2006      Revised:  11 May 2006      Accepted manuscript online: 
PACS:  68.55.-a (Thin film structure and morphology)  
  62.20.Qp (Friction, tribology, and hardness)  
  68.37.Ps (Atomic force microscopy (AFM))  
  68.49.Jk (Electron scattering from surfaces)  
  68.60.Bs (Mechanical and acoustical properties)  
  78.30.-j (Infrared and Raman spectra)  
Fund: roject supported by the National Key Basic Research Program of China (Grant No 2003CB716201) and the National Natural Science Foundation of China (Grant No~50575121) and Electro--Mechanic Technology Advancing Foundation of NSK Ltd of Japan.

Cite this article: 

Zhang Zhen-Yu(张振宇), Lu Xin-Chun(路新春), Luo Jian-Bin(雒建斌), Shao Tian-Min(劭天敏), Qing Tao(卿涛), and Zhang Chen-Hui(张晨辉) Preparation and tribological properties of DLC/Ti filmby pulsed laser arc deposition 2006 Chinese Physics 15 2697

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