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Preparation and tribological properties of DLC/Ti filmby pulsed laser arc deposition
Zhang Zhen-Yu(张振宇), Lu Xin-Chun(路新春), Luo Jian-Bin(雒建斌), Shao Tian-Min(劭天敏), Qing Tao(卿涛), and Zhang Chen-Hui(张晨辉)
Chinese Physics, 2006, 15 (11):
2697-2705.
DOI: 10.1088/1009-1963/15/11/039
This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with $I(D)/I(G)$ 0.28 and corresponding to 76%sp$^{3}$ content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at%content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46~nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.
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