High holding voltage SCR for robust electrostatic discharge protection

doi:10.1088/1674-1056/26/7/077304

Abstract

A novel silicon controlled rectifier (SCR) with high holding voltage (V_h) for electrostatic discharge (ESD) protection is proposed and investigated in this paper. The proposed SCR obtains high V_h by adding a long N+ layer (LN+) and a long P+ layer (LP+), which divide the conventional low voltage trigger silicon controlled rectifier (LVTSCR) into two SCRs (SCR1:P+/Nwell/Pwell/N+ and SCR2:P+/LN+/LP+/N+) with a shared emitter. Under the low ESD current (I_ESD), the two SCRs are turned on at the same time to induce the first snapback with high V_h (V_h1). As the I_ESD increases, the SCR2 will be turned off because of its low current gain. Therefore, the I_ESD will flow through the longer SCR1 path, bypassing SCR2, which induces the second snapback with high V_h (V_h2). The anti-latch-up ability of the proposed SCR for ESD protection is proved by a dynamic TLP-like (Transmission Line Pulse-like) simulation. An optimized V_h2 of 7.4 V with a maximum failure current (I_t2) of 14.7 mA/μ m is obtained by the simulation.

Keywords: electrostatic discharge holding voltage latch-up-free failure current

Received: 15 February 2017
Revised: 27 March 2017
Accepted manuscript online:

PACS:	73.40.Qv	(Metal-insulator-semiconductor structures (including semiconductor-to-insulator))
	85.30.De	(Semiconductor-device characterization, design, and modeling)
	85.30.Mn	(Junction breakdown and tunneling devices (including resonance tunneling devices))
	85.30.Rs	(Thyristors)

Fund:

Project supported by the National Natural Science Foundation of China (Grant Nos.61376080 and 61674027) and the Natural Science Foundation of Guangdong Province,China (Grant Nos.2014A030313736 and 2016A030311022).

Corresponding Authors: Ming Qiao
E-mail: qiaoming@uestc.edu.cn

Cite this article:

Zhao Qi(齐钊), Ming Qiao(乔明), Yitao He(何逸涛), Bo Zhang(张波) High holding voltage SCR for robust electrostatic discharge protection 2017 Chin. Phys. B 26 077304

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High holding voltage SCR for robust electrostatic discharge protection

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