Chin. Phys. B
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Chin. Phys. B  2008, Vol. 17 Issue (9): 3464-3470    DOI: 10.1088/1674-1056/17/9/054
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells
Wang Jian-Huaa, Chen Yong-Shengb, Lu Jing-Xiaoc, Zheng Wenc, Gu Jin-Huac, Yang Shi-Ec, Gao Xiao-Yongc, Guo Xue-Junc, Zhao Shang-Lic, Gao Zhec
a Department of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan 430073, China; b Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;Key Laboratory of Material Physics, Department of Physics, Zhengzhou University, Zhengzhou 450052, China; c Key Laboratory of Material Physics, Department of Physics, Zhengzhou University, Zhengzhou 450052, China

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