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Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering
Wang Xue-Jin(王学进), Liang Chun-Jun(梁春军), Guan Kang-Ping(管康萍), Li De-Hua(李德华), Nie Yu-Xin(聂玉昕), Zhu Shi-Oiu(朱世秋), Huang Feng(黄峰), Zhang Wei-Wei(张葳葳), and Cheng Zheng-Wei(成正维)
Chin. Phys. B, 2008, 17 (9):
3512-3515.
DOI: 10.1088/1674-1056/17/9/062
This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes.
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