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Chinese Physics, 2006, Vol. 15(10): 2397-2401    DOI: 10.1088/1009-1963/15/10/035
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing

Xu Ying(许颖)a)b), Diao Hong-Wei(刁宏伟)a), Hao Hui-Ying(郝会颖)a), Zeng Xiang-Bo(曾湘波)a), and Liao Xian-Bo(廖显伯)a)
a State Laboratory for Surface Physics, Institute of Semiconductors and Center for Condensed Matter Physics, Chinese Academy of Science, Beijing 100083, China; b Beijing Solar Energy Research Institute, Beijing 100083, China
Abstract  In this paper, we use a pulsed rapid thermal processing (RTP) approach to create an emitter layer of hetero-junction solar cell. The process parameters and crystallization behaviour are studied. The structural, optical and electric properties of the crystallized films are also investigated. Both the depth of PN junction and the conductivity of the emitter layer increase with the number of RTP pulses increasing. Simulation results show that efficiencies of such solar cells can exceed 15% with a lower interface recombination rate, but the highest efficiency is 11.65% in our experiments.
Keywords:  emitter      rapid thermal processing (RTP)      PECVD      solar cell  
Received:  10 March 2006      Revised:  07 June 2006      Accepted manuscript online: 
PACS:  84.60.Jt (Photoelectric conversion)  
  72.40.+w (Photoconduction and photovoltaic effects)  
  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  

Cite this article: 

Xu Ying(许颖), Diao Hong-Wei(刁宏伟), Hao Hui-Ying(郝会颖), Zeng Xiang-Bo(曾湘波), and Liao Xian-Bo(廖显伯) Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing 2006 Chinese Physics 15 2397

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