Vanadium oxide thin films deposited on indium tin oxide glass by radio-frequency magnetron sputtering
Wang Xue-Jin (王学进)a, Fei Yun-Jie (费允杰)a, Xiong Yan-Yun (熊艳云)a, Nie Yu-Xin (聂玉昕)a, Feng Ke-An (冯克安)a, Li Lin-De (李林德)b
a Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China; b Panzhihua Iron & Steel Research Institute, Panzhihua, Sichuan 617000, China
Abstract Highly oriented VO2(B), VO2(B) + V6O13 films were grown on indium tin oxide glass by radio-frequency magnetron sputtering. Single phase V6O13 films were obtained from VO2(B) +V6O13 films by annealing at 480℃ in vacuum. The vanadium oxide films were characterized by x-ray diffraction and x-ray photoelectron spectra (XPS). It was found that the formation of vanadium oxide films was affected by substrate temperature and annealing time, because high substrate temperature and annealing were favourable to further oxidation. Therefore, the formation of high valance vanadium oxide films was realized. The V6O13 crystalline sizes become smaller with the increase of annealing time. XPS analysis revealed that the energy position for all the samples was almost constant, but the broadening of the V2p3/2 line of the annealed sample was due to the smaller crystal size of V6O13.
Received: 10 January 2002
Revised: 24 February 2002
Accepted manuscript online:
Fund: Project supported by the National Natural Science Foundation of China (Grant No 50072045).
Cite this article:
Wang Xue-Jin (王学进), Fei Yun-Jie (费允杰), Xiong Yan-Yun (熊艳云), Nie Yu-Xin (聂玉昕), Feng Ke-An (冯克安), Li Lin-De (李林德) Vanadium oxide thin films deposited on indium tin oxide glass by radio-frequency magnetron sputtering 2002 Chinese Physics 11 737
[1]
Effects of preparation parameters on growth and properties of β-Ga2O3 film Zi-Hao Chen(陈子豪), Yong-Sheng Wang(王永胜), Ning Zhang(张宁), Bin Zhou(周兵), Jie Gao(高洁), Yan-Xia Wu(吴艳霞), Yong Ma(马永), Hong-Jun Hei(黑鸿君), Yan-Yan Shen(申艳艳), Zhi-Yong He(贺志勇), and Sheng-Wang Yu(于盛旺). Chin. Phys. B, 2023, 32(1): 017301.
The 50 nm-thick yttrium iron garnet films with perpendicular magnetic anisotropy Shuyao Chen(陈姝瑶), Yunfei Xie(谢云飞), Yucong Yang(杨玉聪), Dong Gao(高栋), Donghua Liu(刘冬华), Lin Qin(秦林), Wei Yan(严巍), Bi Tan(谭碧), Qiuli Chen(陈秋丽), Tao Gong(龚涛), En Li(李恩), Lei Bi(毕磊), Tao Liu(刘涛), and Longjiang Deng(邓龙江). Chin. Phys. B, 2022, 31(4): 048503.
[10]
Sputtered SnO2 as an interlayer for efficient semitransparent perovskite solar cells Zheng Fang(方正), Liu Yang(杨柳), Yongbin Jin(靳永斌), Kaikai Liu(刘凯凯), Huiping Feng(酆辉平), Bingru Deng(邓冰如), Lingfang Zheng(郑玲芳), Changcai Cui(崔长彩), Chengbo Tian(田成波), Liqiang Xie(谢立强), Xipeng Xu(徐西鹏), and Zhanhua Wei(魏展画). Chin. Phys. B, 2022, 31(11): 118801.
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
