Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering

doi:10.1088/1674-1056/ac43a9

Abstract Crystalline phase and microstructure control are critical for obtaining desired properties of Ta films deposited by magnetron sputtering. Structure, phase evolution and properties of Ta films deposited by using hybrid high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS) under different fractions of DCMS power were investigated, where Ta ion to Ta neutral ratios of the deposition flux were changed. The results revealed that the number of Ta ions arriving on the substrate/growing film plays an important role in structure and phase evolution of Ta films. It can effectively avoid the unstable arc discharge under low pressure and show a higher deposition rate by combining HiPIMS and DCMS compared with only HiPIMS. Meanwhile, the high hardness α -Ta films can be directly deposited by hybrid co-sputtering compared to those prepared by DCMS. In the co-sputtering technology, pure α -Ta phase films with extremely fine, dense and uniform crystal grains were obtained, which showed smooth surface roughness (3.22 nm), low resistivity (38.98 μΩ · cm) and abnormal high hardness (17.64 GPa).

Keywords: hybrid sputtering tantalum thin film structure hardness

Received: 04 February 2021
Revised: 12 December 2021
Accepted manuscript online: 16 December 2021

PACS:	61.05.-a	(Techniques for structure determination)
	68.37.-d	(Microscopy of surfaces, interfaces, and thin films)
	81.70.Bt	(Mechanical testing, impact tests, static and dynamic loads)
	52.65.Ww	(Hybrid methods)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51401194).

Corresponding Authors: Yan-Song Liu
E-mail: jdliuyansong@163.com

Cite this article:

Min Huang(黄敏), Yan-Song Liu(刘艳松), Zhi-Bing He(何智兵), and Yong Yi(易勇) Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering 2022 Chin. Phys. B 31 066101

[1] Sun X, Lv S, Li Y, Huang C, Ma H and Luo J 2020 Mat. Sci. Semicon. Proc. 115 105120
[2] Borisyuk P V, Vasilyev O S, Lebedinskii Y Y, Bortko D V and Karazhanov S 2021 Mater. Lett. 286 129204
[3] Shiri S, Odeshi A, Chen N, Feng R, Sutarto R and Yang Q 2019 Surf. Coat. Technol. 358 942
[4] Latif R, Jaafar M F, Aziz M F, Zain A R M, Yunas J and Majlis B Y 2020 Int. J. Refract. Met. H 92 105314
[5] Ellis E A I, Chmielus M, Han S and Baker S P 2020 Acta Mater. 183 504
[6] Ghailane A, Makha M, Larhlimi H and Alami J 2020 Mater. Lett. 280 128540
[7] Navid A A and Hodge A M 2012 Mat. Ssi. Eng. A 536 49
[8] Roychowdhury T, Shah D, Jain V, Patel D I, Dodson B, Skinner W, Hilfiker J N, Smith S J and Linford M R 2020 Surf. Interface Anal. 52 433
[9] Jiang F, Zhang T F, Wu B H, Yu Y, Wu Y P, Zhu S F, Jing F J, Huang N and Leng Y X 2016 Surf. Coat. Technol. 292 54
[10] Zhang H, Cherng J S and Chen Q 2019 AIP Adv. 9 035242
[11] Ghailane A, Larhlimi H, Tamraoui Y, Makha M, Busch H, Fischer C B and Alami J 2020 Surf. Coat. Technol. 404 126572
[12] Gui B, Zhou H, Zheng J, Liu X, Feng X, Zhang Y and Yang L 2021 Ceram. Int. 47 8175
[13] Tillmann W, Grisales D, Stangier D, Ben Jebara I and Kang H 2019 Surf. Coat. Technol. 378 125075
[14] Samuesson M, Lundin D, Sarakinos K, Björefors F, Wälivaara B, Ljungcrantz H and Helmersson U 2012 J. Vac. Sci. Technol. A 30 031507
[15] Zoita N, Dinu M, Kiss A, Logofatu C and Braic M 2021 Appl. Surf. Sci. 537 147903
[16] Luo Q, Yang S and Cooke K E 2013 Surf. Coat. Technol. 236 13
[17] Mendez A, Monclus M A, Santiago J A, Fernandez-Martinez I, Rojas T C, Garcia-Molleja J and Molina-Aldareguia J M 2021 Surf. Coat. Tech. 422 127513
[18] Evaristo M, Fernandes F and Cavaleiro A 2020 Coatings 10 319
[19] Lin J, John J M, William D S, Sabrina L L and Jun W 2010 IEEE Trans. Plasma Sci. 38 3071
[20] Fábio F, Cláudio S, Albano C, André A and João O 2016 Surf. Coat. Technol. 314 97
[21] Ma D, Deng Q, Liu H and Leng Y X 2021 Coating 11 579
[22] Koller C M, Marihart H, Bolvardi H, Kolozsvári S and Mayrhofer P H 2018 Surf. Coat. Technol. 347 304
[23] Engwall A M, Shin S J, Bae J and Wang Y M 2019 Surf. Coat. Technol. 363 191
[24] Myers S, Lin J, Souza R M, Sproul W D and Moore J J 2013 Surf. Coat. Technol. 214 38
[25] Ferreira F, Cavaleiro A and Oliveira J 2020 Metals 10 1618
[26] Gladczuk L, Patel A, Paur C S and Sosnowski M 2004 Thin. Solid Films 467 150
[27] Mongstad T, You C C, Thogersen A, Maehlen J P, Platzer-Björkman C, Hauback B C and Karazhanov S Z 2012 J. Alloy Compd. 527 76
[28] Xiao Y, Wu L, Luo J and Zhou L H 2020 Diam. Relat. Mater. 108 107991
[29] Li J, Fang Q, Liu B, Liu Y and Liu Y 2016 J. Micromech. Microeng. 1 1650001
[30] Javidjam A, Hekmatshoar M H, Hedayatifar L and Abad S N K 2018 Mater. Res. Express 6 036407
[31] Hua D, Xia Q, Wang W, Zhou Q, Li S, Qian D, Shi J and Wang H 2021 Int. J. Plasticity 142 102997
[32] Rackwitz J, Yu Q, Yang Y, Laplanche G, George E P, Minor A M and Ritchie R O 2020 Acta Mater. 200 351
[33] Cao F H, Wang Y J and Dai L H 2020 Acta Mater. 194 283
[34] Dada M, Popoola P, Mathe N, Adeosun S and Pityana S 2021 Int. J. Mater. Res. 3 339
[35] Bhardwaj V, Zhou Q, Zhang F, Han W, Du Y, Hua K and Wang H 2021 Tribol. Int. 160 107031
[36] Tian W, Dai J, Zhang L, Chang Y, Bao M and Yu S 2020 Surf. Eng. 37 160
[37] Luo D, Zhou Q and Ye W 2021 Acs. Appl. Mater. Inter. 13 55712

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Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering

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