| ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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High-performance waveguide-integrated Ge/Si avalanche photodetector with small contact angle between selectively epitaxial growth Ge and Si layers |
| Xiao-Qian Du(杜小倩)1,2, Chong Li(李冲)3, Ben Li(黎奔)3, Nan Wang(王楠)1,2, Yue Zhao(赵越)1,2, Fan Yang(杨帆)1,2, Kai Yu(余凯)1,2, Lin Zhou(周琳)1,2, Xiu-Li Li(李秀丽)1,2,1,2, Bu-Wen Cheng(成步文)1,2, Chun-Lai Xue(薛春来)1,2 |
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
3 Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China |
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Abstract Step-coupler waveguide-integrated Ge/Si avalanche photodetector (APD) is based on the vertical multimode interference (MMI), enhancing light scattering towards the Ge active region and creating mirror images of optical modes close to the Ge layer. However, there are two ineluctable contact angels between selectively epitaxial growth Ge and Si layers and selectively epitaxial growth Si and Si substrate, which has an effect on the coupling efficiency and the absorption of the photodetector. Therefore, step-coupled Ge/Si avalanche photodetectors with different step lengths are designed and fabricated. It is found that responsivity of APDs with step-coupler-length of 3.0 μm is 0.51 A/W at -6 V, 21% higher than that of 1.5 μm, which matches well with simulation absorption. The multiplication gain factor is as high as 50, and the maximum gain-bandwidth product reaches up to 376 GHz.
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Received: 24 January 2019
Revised: 14 March 2019
Accepted manuscript online:
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PACS:
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42.82.Et
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(Waveguides, couplers, and arrays)
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42.79.Gn
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(Optical waveguides and couplers)
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85.60.Gz
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(Photodetectors (including infrared and CCD detectors))
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| Fund: Project supported by the National Key Research and Development Program of China (Grant Nos. 2016YFB0402502 and 2017YFF0104803), the National Natural Science Foundation of China (Grant Nos. 61674140 and 61505003), the Beijing Natural Science Foundation, China (Grant No. 4162063), Beijing Education Commission Project (Grant No. SQKM201610005008), and the Key Research Program of Frontier Sciences, Chinese Academy of Sciences (Grant No. QYZDY-SSW-JSC022). |
Corresponding Authors:
Chun-Lai Xue
E-mail: clxue@semi.ac.cn
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Cite this article:
Xiao-Qian Du(杜小倩), Chong Li(李冲), Ben Li(黎奔), Nan Wang(王楠), Yue Zhao(赵越), Fan Yang(杨帆), Kai Yu(余凯), Lin Zhou(周琳), Xiu-Li Li(李秀丽), Bu-Wen Cheng(成步文), Chun-Lai Xue(薛春来) High-performance waveguide-integrated Ge/Si avalanche photodetector with small contact angle between selectively epitaxial growth Ge and Si layers 2019 Chin. Phys. B 28 064208
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| [1] |
Campbell J C 2016 J. Lightwave Technol. 34 278
|
| [2] |
Humphreys D A and King R J 1985 Electron. Lett. 21 1187
|
| [3] |
Amiento C A and Groves S H 1983 Appl. Phys. Lett. 43 333
|
| [4] |
Li Y, Shi Z F, Li X J and Shan C X 2019 Chin. Phys. B 28 017803
|
| [5] |
Li X, Sun J D, Zhang Z P, Popov V V and Qin H 2018 Chin. Phys. B 27 068506
|
| [6] |
Shi J, Ma R Q, Duan Z L, Liang M, Chai B Y and Dong J 2017 Chin. Phys. B 26 124214
|
| [7] |
Wang X X, Chen.L, Chen W, Cui.H.L, Hu Y, Cai P F, Yang R, Hong C Y, Pan D, Ang K W, Yu M B, Fang Q and Lo G Q 2009 Optical Fiber Communication Conference, 2009, March 22-26, 2009, San Diego, USA, p. OMR3
|
| [8] |
Wu W Z, Cheng B W, Zheng J, Liu Z, Li C B, Zuo Y H and Xue C L 2017 J. Semicond. 38 114003
|
| [9] |
Li B, Yang X H, Yin W H, Lv Q Q, Cui R and Han Q 2014 J. Semicond. 35 074009
|
| [10] |
Ahn D, Hong Y C, Liu J F, Giziewicz W, Beals M, Kimerling L C, Michel J, Chen J and Kartner F X 2007 Opt. Express 15 3916
|
| [11] |
Vivien L, Osmond J, Fedeli J M, Marris-Morini D, Crozat P, Damlencourt J F, Cassan E, Lecunff Y and Laval S 2009 Opt. Express 17 6252
|
| [12] |
Liao B X, Guo X D, Hu H, Liu N, Chen K, Yang X X and Dai Q 2018 Chin. Phys. B 27 094101
|
| [13] |
Kang Y M, Liu H D, Morse M, Paniccia M J, Zadka M, Litski S, Sarid G, Pauchard A, Kuo Y H, Chen H W, Zaoui W S, Bowers J E, Beling A, Mcintosh D C, Zheng X G and Campbell J C 2009 Nat. Photon. 3 59
|
| [14] |
Rouvié A, Carpentier D, Lagay N, Décobert J, Pommereau F and Achouche M 2008 IEEE Photon. Tech. Lett. 20 455
|
| [15] |
Yin T, Cohen R, Morse M M, Sarid G, Chetrit Y, Rubin D and Paniccia M J 2007 Opt. Express 15 13965
|
| [16] |
Michel J, Liu J F and Kimerling L C 2010 Nat. Photon. 4 527
|
| [17] |
Duan N, Liow T Y, Lim A E, Ding L and Lo G Q 2013 Optical Fiber Communication Conference, 2013, March 17-21, 2013, Anaheim, USA, p. OM3K.3
|
| [18] |
Liow T Y, Duan N, Lim A E, Tu X G, Yu M B and Lo G Q 2014 Optical Fiber Communication Conference, 2014, March 9-13, 2014, San Francisco, USA, p. M2G.6
|
| [19] |
Chen H, Verheyen P, Heyn P D, Lepage G, Coster J D, Balakrishnan S, Absil P, Yao W, Shen L, Roelkens G and Campenhout J V 2016 Opt. Express 24 4622
|
| [20] |
Zhu S Y, Ang K W, C Rustagi S, Wang J, Xiong Y Z, Lo G Q and Kwong D L 2009 IEEE Electron Dev. Lett. 30 934
|
| [21] |
Nicholas J D M, Michael G, Christopher T D, Andrew L S, Andrew T P, Anthony L L, Douglas C T and Paul S D 2017 Opt. Express 25 16130
|
| [22] |
Nicholas J D M, Christopher T D, Reinhard W B, Andrew L S, Andrew T P, Anthony L L, Douglas C T and Paul S D 2016 Opt. Express 24 019072
|
| [23] |
Wang X and Liu J 2011 IEEE Photon. Technol. Lett. 23 146
|
| [24] |
Halbwax M, Nguyen L H, Fossard F, Roux X L, Mathet V, Yam V, Cao D T and Bouchier D 2006 Mater. Sci. Semicond. Process. 9 460
|
| [25] |
Hartmann J M, Abbadie A, Papon A M, Holliger P, Roll, G, Billon T and Fédéli J M 2004 J. Appl. Phys. 95 5905
|
| [26] |
Cong H, Xue C L, Liu Z, Li C B, Cheng B W and Wang Q M 2016 Chin. Phys. B 25 058503
|
| [27] |
Dash W C and Newman R 1955 Phys. Rev. 99 1151
|
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