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Chin. Phys. B, 2012, Vol. 21(3): 038101    DOI: 10.1088/1674-1056/21/3/038101
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

Zn/O ratio and oxygen chemical state of nanocrystalline ZnO films grown at different temperatures

Fan Hai-Bo(范海波), Zheng Xin-Liang(郑新亮), Wu Si-Cheng(吴思诚), Liu Zhi-Gang(刘志刚), and Yao He-Bao(姚合宝)
Department of Physics, National Key Laboratory of Photoelectric Technology and Functional Materials (Culture Base), National Photoelectric Technology and Functional Materials & Application of Science and Technology International Cooperation Base, Northwest University, Xi'an 710069, China
Abstract  ZnO nanocrystalline films are prepared on Si substrates at different temperatures by using metal-organic chemical vapour deposition (MOCVD). It is observed that when the growth temperature is low, the stoichiometric ratio between Zn and O atoms has a large deviation from the ideal ratio of 1:1. The ZnO grains in the film have small sizes and are not well crystallized, resulting in a poor photoluminescence (PL) property. When the temperature is increased to an appropriate value, the Zn/O ratio becomes optimized, and most of Zn and O atoms are combined into Zn-O bonds. Then the film has good crystal quality and good PL property. If the temperature is fairly high, the interfacial mutual diffusion of atoms between the substrate and the epitaxial film appears, and the desorption process of the oxygen atoms is enhanced. However, it has no effect on the film property. The film still has the best crystal quality and PL property.
Keywords:  ZnO film      metal-organic chemical vapour deposition      growth temperature      Zn/O ratio  
Received:  30 August 2011      Revised:  18 October 2011      Accepted manuscript online: 
PACS:  81.05.Dz (II-VI semiconductors)  
  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  
  68.55.-a (Thin film structure and morphology)  
Fund: Project supported by the Natural Science Foundation of Shaanxi Province, China (Grant No. 2011JQ6015) and the Natural Science Foundation of Shaanxi Provincial Educational Committee, China (Grant No. 09JK740).
Corresponding Authors:  Fan Hai-Bo,hbfan@nwu.edu.cn     E-mail:  hbfan@nwu.edu.cn

Cite this article: 

Fan Hai-Bo(范海波), Zheng Xin-Liang(郑新亮), Wu Si-Cheng(吴思诚), Liu Zhi-Gang(刘志刚), and Yao He-Bao(姚合宝) Zn/O ratio and oxygen chemical state of nanocrystalline ZnO films grown at different temperatures 2012 Chin. Phys. B 21 038101

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