Optical properties of hexagonal boron nitride thin films deposited by radio frequency bias magnetron sputtering
Deng Jin-Xiang(邓金祥)a)†, Zhang Xiao-Kang(张晓康)a)b), Yao Qian(姚倩)b), Wang Xu-Yang(汪旭洋)a), Chen Guang-Hua(陈光华)a), and He De-Yan(贺德衍)b)
a School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100124, China; b School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China
Abstract The optical properties of hexagonal boron nitride (h-BN) thin films were studied in this paper. The films were characterized by Fourier transform infrared spectroscopy, UV--visible transmittance and reflection spectra. h-BN thin films with a wide optical band gap Eg (5.86 eV for the as-deposited film and 5.97 eV for the annealed film) approaching h-BN single crystal were successfully prepared by radio frequency (RF) bias magnetron sputtering and post-deposition annealing at 970 K. The optical absorption behaviour of h-BN films accords with the typical optical absorption characteristics of amorphous materials when fitting is made by the Urbach tail model. The annealed film shows satisfactory structure stability. However, high temperature still has a significant effect on the optical absorption properties, refractive index n, and optical conductivity $\sigma$ of h-BN thin films. The blue-shift of the optical absorption edge and the increase of Eg probably result from stress relaxation in the film under high temperatures. In addition, it is found that the refractive index clearly exhibits different trends in the visible and ultraviolet regions. Previous calculational results of optical conductivity of h-BN films are confirmed in our experimental results.
Received: 15 November 2008
Revised: 13 April 2009
Accepted manuscript online:
Fund: Project supported
by the National Natural Science Foundation of China (Grants Nos
60876006 and 60376007) and the Natural Science Foundation of Beijing
(Grants No 4072007).
Cite this article:
Deng Jin-Xiang(邓金祥), Zhang Xiao-Kang(张晓康), Yao Qian(姚倩), Wang Xu-Yang(汪旭洋), Chen Guang-Hua(陈光华), and He De-Yan(贺德衍) Optical properties of hexagonal boron nitride thin films deposited by radio frequency bias magnetron sputtering 2009 Chin. Phys. B 18 4013
[1]
Effects of preparation parameters on growth and properties of β-Ga2O3 film Zi-Hao Chen(陈子豪), Yong-Sheng Wang(王永胜), Ning Zhang(张宁), Bin Zhou(周兵), Jie Gao(高洁), Yan-Xia Wu(吴艳霞), Yong Ma(马永), Hong-Jun Hei(黑鸿君), Yan-Yan Shen(申艳艳), Zhi-Yong He(贺志勇), and Sheng-Wang Yu(于盛旺). Chin. Phys. B, 2023, 32(1): 017301.
The 50 nm-thick yttrium iron garnet films with perpendicular magnetic anisotropy Shuyao Chen(陈姝瑶), Yunfei Xie(谢云飞), Yucong Yang(杨玉聪), Dong Gao(高栋), Donghua Liu(刘冬华), Lin Qin(秦林), Wei Yan(严巍), Bi Tan(谭碧), Qiuli Chen(陈秋丽), Tao Gong(龚涛), En Li(李恩), Lei Bi(毕磊), Tao Liu(刘涛), and Longjiang Deng(邓龙江). Chin. Phys. B, 2022, 31(4): 048503.
Stability of liquid crystal systems doped with γ-Fe2O3 nanoparticles Xu Zhang(张旭), Ningning Liu(刘宁宁), Zongyuan Tang(唐宗元), Yingning Miao(缪应宁), Xiangshen Meng(孟祥申), Zhenghong He(何正红), Jian Li(李建), Minglei Cai(蔡明雷), Tongzhou Zhao(赵桐州), Changyong Yang(杨长勇), Hongyu Xing(邢红玉), and Wenjiang Ye(叶文江). Chin. Phys. B, 2021, 30(9): 096101.
No Suggested Reading articles found!
Viewed
Full text
Abstract
Cited
Altmetric
blogs
tweeters
Facebook pages
Wikipedia page
Google+ users
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.