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Stoney formula for piezoelectric film/elastic substrate system |
| Wang-Min Zhou(周旺民)1, Wang-Jun Li(李望君)1, Sheng-Yun Hong(洪圣运)1, Jie Jin(金杰)2, Shu-Yuan Yin(尹姝媛)3 |
1 College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China;
2 College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China;
3 College of Science, Zhejiang University of Technology, Hangzhou 310023, China |
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Abstract With the trends in miniaturization, and particularly the introduction of micro- and nano-electro-mechanical system, piezoelectric materials used in microelectronic devices are deposited usually in the form of thin film on elastic substrates. In this work, the bending of a bilayer comprising a piezoelectric film deposited on an elastic substrate, due to the mismatch, is investigated. An analytic formula relating the curvature of the bilayer to the mismatch, the electroelastic constants and the film thickness is obtained, and from this formula, a transverse piezoelectric constant d31 can be estimated. Meanwhile the influence of electromechanical coupling coefficient on the curvature is discussed.
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Received: 08 October 2016
Revised: 06 December 2016
Accepted manuscript online:
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PACS:
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77.65.-j
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(Piezoelectricity and electromechanical effects)
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77.65.Ly
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(Strain-induced piezoelectric fields)
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46.25.Hf
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(Thermoelasticity and electromagnetic elasticity (electroelasticity, magnetoelasticity))
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| Fund: Project supported by the Zhejiang Provincial Natural Science Foundation, China (Grant No. Y6100440). |
Corresponding Authors:
Wang-Min Zhou
E-mail: zhouwm@zjut.edu.cn
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Cite this article:
Wang-Min Zhou(周旺民), Wang-Jun Li(李望君), Sheng-Yun Hong(洪圣运), Jie Jin(金杰), Shu-Yuan Yin(尹姝媛) Stoney formula for piezoelectric film/elastic substrate system 2017 Chin. Phys. B 26 037701
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