Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition

doi:10.1088/1674-1056/24/6/067803

Abstract Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH₄ mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy (AFM), Raman spectroscopy, nanoindentation, and Fourier transform infrared (FTIR) spectroscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp² and sp³ hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp³ bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp³ carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases.

Keywords: DLC thin film ion-beam sputtering deposition chemical bondings infrared optical and mechanical properties

Received: 04 January 2015
Revised: 26 January 2015
Accepted manuscript online:

PACS:	78.66.-w	(Optical properties of specific thin films)
	78.30.-j	(Infrared and Raman spectra)
	78.20.Ci	(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61235011) and the Science Foundation of the Science and Technology Commission of Tianjin Municipality, China (Grant Nos. 13JCYBJC17300 and 12JCQNIC01200).

Corresponding Authors: Hu Ming
E-mail: huming@tju.edu.cn

About author: 78.66.-w; 78.30.-j; 78.20.Ci

Cite this article:

Sun Peng (孙鹏), Hu Ming (胡明), Zhang Feng (张锋), Ji Yi-Qin (季一勤), Liu Hua-Song (刘华松), Liu Dan-Dan (刘丹丹), Leng Jian (冷健) Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition 2015 Chin. Phys. B 24 067803

[1]	Andersson L P, Berg S, Norslrom H, Olaison R and Towta S 1979 Thin Solid Films 63 155
[2]	Pan Y Q, Hang L X, Wu Z S and Yin Y B 2009 Infrared Phys. Technol. 52 193
[3]	Hirakuri K K, Mutsukura N and Machi Y 1995 Vacuum 46 57
[4]	Su C H, Lin C R, Chang C Y, Hung H C and Lin T Y 2006 Thin Solid Films 498 220
[5]	Marciano F R, Marcuzzo J S, Bonetti L F, Corat E J and Trava-Airoldi V J 2009 Surf. Coat. Technol. 204 64
[6]	Zhang L, Ma G J, Lin G Q, Ma H and Han K C 2014 Chin. Phys. B 23 048102
[7]	Tabbal M, Mérel P, Chaker M, El Khakani M A, Herbert E G, Lucas B N and O'Hern M E 1999 J. Appl. Phys. 85 3860
[8]	Pandey B, Pal P P, Bera S, Ray S K and Kar A K 2012 Appl. Surf. Sci. 261 789
[9]	Yang L, Wang Z D, Zhang S Y, Yang L Z and Chen Q 2009 Chin. Phys. B 18 5401
[10]	Kumar S, Dwivedi N, Rauthan C M S and Panwar O S 2010 Vacuum 84 882
[11]	Lee D H, He X M, Walter K C, Nastasi M, Tesmer J R, Tuszewski M and Tallant D R 1998 Appl. Phys. Lett. 73 2423
[12]	Bhattacharyya S and Silva S R P 2005 Thin Solid Films 482 94
[13]	Dwivedi Neeraj, Kumar Sushil, Ishpal, Dayal Saurabh, Govind, Rauthan C M S and Panwar O S 2011 J. Alloys Compd. 509 1285
[14]	Smietana M, Szmidt J, Korwin-Pawlowski M L, Miller N and Elmustafa A A 2008 Diamond Relat. Mater. 17 1655
[15]	Adhikari Sudip, Ghimire Dilip Chandra, Aryal Hare Ram, Kalita Golap and Umeno Masayoshi 2008 Diamond Relat. Mater. 17 696
[16]	Sánchez N A, Rincón C, Zambrano G, Galindo H and Prieto P 2000 Thin Solid Films. 373 247
[17]	Hang L X, Yin Y and Xu J Q 2006 Thin Solid Films 515 357
[18]	Balon F, Stolojan V, Silva S R P, Michalka M and Kromka A 2005 Vacuum 80 163
[19]	Loir A S, Garrelie F, Donnet C, Subtil J L, Belin M, Forest B, Rogemond F and Laporte P 2005 Appl. Surf. Sci. 247 225
[20]	Liu H S, Jing Y G, Wang L S, Leng J, Sun P, Zhuang K W, Ji Y Q, Cheng X B, Jiao H F and Wang Z S 2014 Appl. Opt. 53 A405
[21]	Jiang Y G, Liu H S, Wang L S, Cheng X B, Yang Y P and Ji Y Q 2014 Appl. Opt. 53 A1
[22]	Meškinis Š, Kopustinskas V, Šlapikas K, Tamulevičius S, Guobienë A, Gudaitis R and Grigaliūnas V 2006 Thin Solid Films 515 636
[23]	Rybachuk M and Bell J M 2010 Appl. Surf. Sci. 257 143
[25]	Hu C Q, Xu L, Tian H W, Jin Z S, Lv X Y and Zheng W T 2006 J. Phys. D: Appl. Phys. 39 5074
[26]	Mansano R D, Massi M, Zambom L S, Verdonck P, Nogueira P M, Maciel H S and Otani C 2000 Thin Solid Films 373 243
[27]	Dwivedi Neeraj, Kumar Sushil, Malik H K, Govind, Rauthan C M S and Panwar O S 2011 Appl. Surf. Sci. 257 6804
[28]	Craig S and Harding G L 1982 Thin Solid Films 97 345

[1]	Optical and electrical properties of BaSnO₃ and In₂O₃ mixed transparent conductive films deposited by filtered cathodic vacuum arc technique at room temperature Jian-Ke Yao(姚建可) and Wen-Sen Zhong(钟文森). Chin. Phys. B, 2023, 32(1): 018101.
[2]	Gamma induced changes in Makrofol/CdSe nanocomposite films Ali A. Alhazime, M. ME. Barakat, Radiyah A. Bahareth, E. M. Mahrous,Saad Aldawood, S. Abd El Aal, and S. A. Nouh. Chin. Phys. B, 2022, 31(9): 097802.
[3]	Uniform light emission from electrically driven plasmonic grating using multilayer tunneling barriers Xiao-Bo He(何小波), Hua-Tian Hu(胡华天), Ji-Bo Tang(唐继博), Guo-Zhen Zhang(张国桢), Xue Chen(陈雪), Jun-Jun Shi(石俊俊), Zhen-Wei Ou(欧振伟), Zhi-Feng Shi(史志锋), Shun-Ping Zhang(张顺平), Chang Liu(刘昌), and Hong-Xing Xu(徐红星). Chin. Phys. B, 2022, 31(1): 017803.
[4]	Optically tuned dielectric characteristics of SrTiO₃/Si thin film in the terahertz range Bin Zou(邹斌), Qing-Qing Li(李晴晴), Yu-Ping Yang(杨玉平), and Hai-Zhong Guo(郭海中). Chin. Phys. B, 2021, 30(10): 107802.
[5]	Analysis of properties of krypton ion-implanted Zn-polar ZnO thin films Qing-Fen Jiang(姜清芬), Jie Lian(连洁), Min-Ju Ying(英敏菊), Ming-Yang Wei(魏铭洋), Chen-Lin Wang(王宸琳), and Yu Zhang(张裕). Chin. Phys. B, 2021, 30(9): 097801.
[6]	Origin of anomalous enhancement of the absorption coefficient in a PN junction Xiansheng Tang(唐先胜), Baoan Sun(孙保安), Chen Yue(岳琛), Xinxin Li(李欣欣), Junyang Zhang(张珺玚), Zhen Deng(邓震), Chunhua Du(杜春花), Wenxin Wang(王文新), Haiqiang Jia(贾海强), Yang Jiang(江洋), Weihua Wang(汪卫华), and Hong Chen(陈弘). Chin. Phys. B, 2021, 30(9): 097804.
[7]	Thermally induced band hybridization in bilayer-bilayer MoS₂/WS₂ heterostructure Yanchong Zhao(赵岩翀), Tao Bo(薄涛), Luojun Du(杜罗军), Jinpeng Tian(田金朋), Xiaomei Li(李晓梅), Kenji Watanabe, Takashi Taniguchi, Rong Yang(杨蓉), Dongxia Shi(时东霞), Sheng Meng(孟胜), Wei Yang(杨威), and Guangyu Zhang(张广宇). Chin. Phys. B, 2021, 30(5): 057801.
[8]	Acoustic plasmonics of Au grating/Bi₂Se₃ thin film/sapphirehybrid structures Weiwu Li(李伟武), Konstantin Riegel, Chuanpu Liu(刘传普), Alexey Taskin, Yoichi Ando, Zhimin Liao(廖志敏), Martin Dressel, Yuan Yan(严缘). Chin. Phys. B, 2020, 29(6): 067801.
[9]	Optical and electrical properties of InGaZnON thin films Jian Ke Yao(姚建可), Fan Ye(叶凡), Ping Fan(范平). Chin. Phys. B, 2020, 29(1): 018105.
[10]	Superlubricity enabled dry transfer of non-encapsulated graphene Zhe Ying(应哲), Aolin Deng(邓奥林), Bosai Lyu(吕博赛), Lele Wang(王乐乐), Takashi Taniguchi, Kenji Watanabe, Zhiwen Shi(史志文). Chin. Phys. B, 2019, 28(2): 028102.
[11]	Physical manipulation of ultrathin-film optical interference for super absorption and two-dimensional heterojunction photoconversion Guo-Yang Cao(曹国洋), Cheng Zhang(张程), Shao-Long Wu(吴绍龙), Dong Ma(马冬), Xiao-Feng Li(李孝峰). Chin. Phys. B, 2018, 27(12): 124202.
[12]	Raman spectroscopy characterization of two-dimensional materials Fang Liang(梁芳), Hejun Xu(徐何军), Xing Wu(吴幸), Chaolun Wang(王超伦), Chen Luo(骆晨), Jian Zhang(张健). Chin. Phys. B, 2018, 27(3): 037802.
[13]	Structural, optical, and electrical properties of Cu-doped ZrO₂ films prepared by magnetron co-sputtering Nian-Qi Yao(姚念琦), Zhi-Chao Liu(刘智超), Guang-Rui Gu(顾广瑞), Bao-Jia Wu(吴宝嘉). Chin. Phys. B, 2017, 26(10): 106801.
[14]	Structural, electronic, optical, and magnetic properties of Co-doped Cu₂O I Djabri, T Rezkallah, F Chemam. Chin. Phys. B, 2017, 26(2): 027102.
[15]	Polarization-independent terahertz wave modulator based on graphene-silicon hybrid structure Liang-Liang Du(杜亮亮), Quan Li(李泉), Shao-Xian Li(李绍限), Fang-Rong Hu(胡放荣), Xian-Ming Xiong(熊显名), Yan-Feng Li(栗岩锋), Wen-Tao Zhang(张文涛), Jia-Guang Han(韩家广). Chin. Phys. B, 2016, 25(2): 027301.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition

Cite this article:

Online attention