Structural, optical, and electrical properties of Cu-doped ZrO2 films prepared by magnetron co-sputtering

doi:10.1088/1674-1056/26/10/106801

Abstract

Copper (Cu)-doped ZrO₂ (CZO) films with different Cu content (0 at.%~8.07 at.%) are successfully deposited on Si (100) substrates by direct current (DC) and radio frequency (RF) magnetron co-sputtering. The influences of Cu content on structural, morphological, optical and electrical properties of CZO films are discussed in detail. The CZO films exhibit ZrO₂ monocline (111) preferred orientation, which indicates that Cu atoms are doped in ZrO₂ host lattice. The crystallite size estimated form x-ray diffraction (XRD) increases by Cu doping, which accords with the result observed from the scanning electron microscope (SEM). The electrical resistivity decreases from 2.63 Ω.cm to 1.48 Ω·cm with Cu doping content increasing, which indicates that the conductivity of CZO film is improved. However, the visible light transmittances decrease slightly by Cu doping and the optical band gap values decrease from 4.64 eV to 4.48 eV for CZO films.

Keywords: Cu-doped ZrO₂ films magnetron co-sputtering resistivity transmittance

Received: 10 April 2017
Revised: 27 June 2017
Accepted manuscript online:

PACS:	68.55.A-	(Nucleation and growth)
	73.61.-r	(Electrical properties of specific thin films)
	78.66.-w	(Optical properties of specific thin films)
	81.15.Cd	(Deposition by sputtering)

Fund:

Project supported by the National Natural Science Foundation of China (Grant Nos. 51272224 and 11164031).

Corresponding Authors: Guang-Rui Gu
E-mail: grgu@ybu.edu.cn

Cite this article:

Nian-Qi Yao(姚念琦), Zhi-Chao Liu(刘智超), Guang-Rui Gu(顾广瑞), Bao-Jia Wu(吴宝嘉) Structural, optical, and electrical properties of Cu-doped ZrO₂ films prepared by magnetron co-sputtering 2017 Chin. Phys. B 26 106801

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Structural, optical, and electrical properties of Cu-doped ZrO2 films prepared by magnetron co-sputtering

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Structural, optical, and electrical properties of Cu-doped ZrO₂ films prepared by magnetron co-sputtering