Optical study of Ba(MnxTi(1-x)O3) thin films by spectroscopic ellipsometry

doi:10.1088/1674-1056/22/11/117801

Abstract Stoichiometric Ba(Mn_xTi_(1-x)O₃) (BMT) thin films with various values of x were deposited on Si(111) substrates by the sol-gel technique. The influence of Mn content on the optical properties was studied by spectroscopic ellipsometry (SE) in the UV–Vis–NIR region. By fitting the measured ellipsometric parameter (Ψ and Δ) with a four-phase model (air/BMT+voids/BMT/Si(111)), the key optical constants of the thin films have been obtained. It was found that the refractive index n and the extinction coefficient k increase with increasing Mn content due to the increase in the packing density. Furthermore, a strong dependence of the optical band gap E_g on Mn/Ti ratios in the deposited films was observed, and it was inferred that the energy level of conduction bands decreases with increasing Mn content.

Keywords: Ba(Mn_xTi_(1-x)O₃) (BMT) thin films spectroscopic ellipsometry refractive index extinction coefficient

Received: 21 March 2013
Revised: 28 May 2013
Accepted manuscript online:

PACS:	78.20.Bh	(Theory, models, and numerical simulation)
	78.20.Ci	(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))
	78.66.-w	(Optical properties of specific thin films)
	78.68.+m	(Optical properties of surfaces)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60976016), the Postdoctoral Science Foundation of China (Grant No. 2012M511250), and the Foundation Co-established by Henan Province and the Ministry of Henan University, China (Grant No. SBGJ090503).

Corresponding Authors: Zhang Wei-Feng
E-mail: wfzhang@henu.edu.cn

Cite this article:

Zhang Ting (张婷), Yin Jiang (殷江), Ding Ling-Hong (丁玲红), Zhang Wei-Feng (张伟风) Optical study of Ba(Mn_xTi_(1-x)O₃) thin films by spectroscopic ellipsometry 2013 Chin. Phys. B 22 117801

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Optical study of Ba(MnxTi(1-x)O3) thin films by spectroscopic ellipsometry

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Optical study of Ba(Mn_xTi_(1-x)O₃) thin films by spectroscopic ellipsometry