High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

doi:10.1088/1674-1056/ac76ac

Abstract A metal-insulator-metal (MIM)-based arc-shaped resonator coupled with a rectangular stub (MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method (FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches 1900 nm/refractive index unit (RIU), and the figure of merit (FOM) is 23.75.

Keywords: Fano resonance metal-insulator-metal (MIM) waveguide refractive index sensor Fabry—Perot (F-P) cavity

Received: 18 April 2022
Revised: 27 May 2022
Accepted manuscript online:

PACS:	81.07.Oj	(Nanoelectromechanical systems (NEMS))
	87.85.Ox	(Biomedical instrumentation and micro-electro-mechanical systems (MEMS))

Fund: The work was supported in part by the National Natural Science Foundation of China (Grant Nos. 61875250 and 61975189), the Zhejiang Provincial Natural Science Foundation of China (Grant Nos. LD21F050001 and Y21F040001), the Key Research Project by Department of Water Resources of Zhejiang Province (Grant No. RA2101), the Key Research and Development Project of Zhejiang Province (Grant No. 2021C03019), the Key R&D Projects of Shanxi Province (Grant Nos. 201903D421032 and 01804D131038), and the Scientific Research Foundation of Zhejiang University of Water Resources and Electric Power (Grant No. xky2022032).

Corresponding Authors: Shubin Yan
E-mail: yanshb@zjweu.edu.cn

Cite this article:

Shubin Yan(闫树斌), Hao Su(苏浩), Xiaoyu Zhang(张晓宇), Yi Zhang(张怡), Zhanbo Chen(陈展博), Xiushan Wu(吴秀山), and Ertian Hua(华尔天) High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub 2022 Chin. Phys. B 31 108103

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High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

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