Chin. Phys. B
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Chin. Phys. B  2014, Vol. 23 Issue (11): 118801    DOI: 10.1088/1674-1056/23/11/118801
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search |
Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation
Shen Ze-Nan, Xia Yang, Liu Bang-Wu, Liu Jin-Hu, Li Chao-Bo, Li Yong-Tao
Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

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