Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

doi:10.1088/1674-1056/20/11/116103

Abstract Well-aligned and closely-packed silicon nanopillar (SNP) arrays are fabricated by using a simple method with magnetron sputtering of Si on a porous anodic alumina (PAA) template at room temperature. The SNPs are formed by selective growth on the top of the PAA pore walls. The growth mechanism analysis indicates that the structure of the SNPs can be modulated by the pore spacing of the PAA and the sputtering process and is independent of the wall width of the PAA. Moreover, nanocrystals are identified by using transmission electron microscopy in the as-deposited SNP samples, which are related to the heat isolation structure of the SNPs. The Raman focus depth profile reveals a high crystallization ratio on the surface.

Keywords: silicon nanopillar arrays porous anodic alumina nanocrystal room temperature

Received: 08 April 2011
Revised: 29 June 2011
Accepted manuscript online:

PACS:	61.46.Km	(Structure of nanowires and nanorods (long, free or loosely attached, quantum wires and quantum rods, but not gate-isolated embedded quantum wires))
	78.67.Qa	(Nanorods)
	81.16.Dn	(Self-assembly)
	61.46.Hk	(Nanocrystals)

Fund: Project supported by the Major State Basic Research Programme of China (Grant No. 2007CB613404), the National Natural Science Foundation of China (Grant Nos. 60906035, 61036001, 61036003, and 51072194), and the Knowledge Innovation Program of the Chinese Academy of Sciences (Grant No. ISCAS2009T01).

Cite this article:

Bai An-Qi(白安琪), Zheng Jun(郑军), Tao Ye-Liao(陶冶了), Zuo Yu-Hua(左玉华), Xue Chun-Lai(薛春来), Cheng Bu-Wen(成步文), and Wang Qi-Ming(王启明) Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature 2011 Chin. Phys. B 20 116103

[1]	Brus L E and Trautman J K 1995 Phil. Trans. R. Soc. Lond. A 353 313
[2]	Alivisatos A P 1996 Science 271 933
[3]	Wang Q M 2002 Prog. Phys. 22 359 (in Chinese)
[4]	Cloutier S G, Kossyrev P A and Xu J 2005 Nat. Mater. 4 887
[5]	Fan Z Y, Razavi H, Do J W, Moriwaki A, Ergen O, Chueh Y L, Leu P W, Ho J C, Takahashi T, Reichertz L A, Neale S, Yu K, Wu M, Ager J W and Javey A 2009 Nat. Mater. 8 648
[6]	Garnett E and Yang P D 2010 Nano Lett. 10 1082
[7]	Kan P Z, Zhao S L, Xu Z, Kong C, Wang D W and Yan Y 2010 Acta Phys. Sin. 59 616 (in Chinese)
[8]	Bai A Q, Hu D, Ding W C, Su S J, Hu W X, Xue C L, Fan Z C, Cheng B W, Yu Y D and Wang Q M 2009 Acta Phys. Sin. 58 4997 (in Chinese)
[9]	Tian B Z, Zheng X L, Kempa T J, Fang Y, Yu N F, Yu G H, Huang J L and Lieber C M 2007 Nature 449 885
[10]	Bai A Q, Cheng B W, Wang X F, Xue C L, Zuo Y H and Wang Q M 2010 J. Nanosci. Nanotechnol. 10 7428
[11]	Motta N, Rosei F, Sgarlata A, Capellini G, Mobilio S and Boscherini F 2002 Mater. Sci. Eng. B 88 264
[12]	Goncalves C, Charvet S, Zeinert A, Clin M and Zellama K 2002 Thin Solid Films 403 91
[13]	Silalahi S T H, Yang H Y, Pita K and Yu M B 2009 Electrochem. Solid-State Lett. 12 K29
[14]	Zuo Y H, Tao Y L, Zheng J, Cao Q, Ma Z H, Wang W, Xue C L, Zhang G Z, Cheng B W, Wang Q M and Xu J 2010 25th European Photovoltaic Solar Energy Conference and Exhibition, September 6-10, 2010 Valencia, Spain, poster 1.DV.3.70

[1]	High-sensitive terahertz detection by parametric up-conversion using nanosecond pulsed laser Yuye Wang(王与烨), Gang Nie(聂港), Changhao Hu(胡常灏), Kai Chen(陈锴), Chao Yan(闫超), Bin Wu(吴斌), Junfeng Zhu(朱军峰), Degang Xu(徐德刚), and Jianquan Yao(姚建铨). Chin. Phys. B, 2022, 31(2): 024204.
[2]	In-situ fabrication of ZnO nanoparticles sensors based on gas-sensing electrode for ppb-level H₂S detection at room temperature Jing-Yue Xuan(宣景悦), Guo-Dong Zhao(赵国栋), Xiao-Bo Shi(史小波), Wei Geng(耿伟), Heng-Zheng Li(李恒征), Mei-Ling Sun(孙美玲), Fu-Chao Jia(贾福超), Shu-Gang Tan(谭树刚), Guang-Chao Yin(尹广超), and Bo Liu(刘波). Chin. Phys. B, 2021, 30(2): 020701.
[3]	Characterization, spectroscopic investigation of defects by positron annihilation, and possible application of synthesized PbO nanoparticles Sk Irsad Ali, Anjan Das, Apoorva Agrawal, Shubharaj Mukherjee, Maudud Ahmed, P M G Nambissan, Samiran Mandal, and Atis Chandra Mandal. Chin. Phys. B, 2021, 30(2): 026103.
[4]	Effects of water on the structure and transport properties of room temperature ionic liquids and concentrated electrolyte solutions Jinbing Zhang(张晋兵), Qiang Wang(王强), Zexian Cao(曹则贤). Chin. Phys. B, 2020, 29(8): 087804.
[5]	Growth and aggregation of Cu nanocrystals on ionic liquid surfaces Jia-Wei Shen(沈佳伟), Xun-Heng Ye(叶迅亨), Zhi-Long Bao(鲍志龙), Lu Li(李璐), Bo Yang(杨波), Xiang-Ming Tao(陶向明), Gao-Xiang Ye(叶高翔). Chin. Phys. B, 2020, 29(6): 066801.
[6]	Anisotropic plasticity of nanocrystalline Ti: A molecular dynamics simulation Minrong An(安敏荣), Mengjia Su(宿梦嘉), Qiong Deng(邓琼), Haiyang Song(宋海洋), Chen Wang(王晨), Yu Shang(尚玉). Chin. Phys. B, 2020, 29(4): 046201.
[7]	A low-dimensional crystal growth model on an isotropic and quasi-free sustained substrate Chenxi Lu(卢晨曦), Senjiang Yu(余森江), Lingwei Li(李领伟), Bo Yang(杨波), Xiangming Tao(陶向明), Gaoxiang Ye(叶高翔). Chin. Phys. B, 2020, 29(3): 038101.
[8]	Photoluminescence changes of C₇₀ nanotubes induced by laser irradiation Han-Da Wang(王汉达), De-Di Liu(刘德弟)†, Yang-Yang He(何洋洋), Hong-Sheng Jia(贾洪声)‡, Ran Liu(刘然), Bo Liu(刘波), Nai-Sen Yu(于乃森), and Zhen-Yi Zhang(张振翼). Chin. Phys. B, 2020, 29(10): 104209.
[9]	Infrared light-emitting diodes based on colloidal PbSe/PbS core/shell nanocrystals Byung-Ryool Hyun, Mikita Marus, Huaying Zhong(钟华英), Depeng Li(李德鹏), Haochen Liu(刘皓宸), Yue Xie(谢阅), Weon-kyu Koh, Bing Xu(徐冰), Yanjun Liu(刘言军), Xiao Wei Sun(孙小卫). Chin. Phys. B, 2020, 29(1): 018503.
[10]	Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire Yun-Zheng Li(李昀铮), Qiu-Ju Feng(冯秋菊), Bo Shi(石博), Chong Gao(高冲), De-Yu Wang(王德煜), Hong-Wei Liang(梁红伟). Chin. Phys. B, 2020, 29(1): 018102.
[11]	CsPbBr₃ nanocrystal for mode-locking Tm-doped fiber laser Yan Zhou(周延), Renli Zhang(张仁栗), Xia Li(李夏), Peiwen Kuan(关珮雯), Dongyu He(贺冬钰), Jingshan Hou(侯京山), Yufeng Liu(刘玉峰), Yongzheng Fang(房永征), Meisong Liao(廖梅松). Chin. Phys. B, 2019, 28(9): 094203.
[12]	Effects of bismuth on structural and dielectric properties of cobalt-cadmium spinel ferrites fabricated via micro-emulsion route Furhaj Ahmed Sheikh, Muhammad Khalid, Muhammad Shahzad Shifa, H M Noor ul Huda Khan Asghar, Sameen Aslam, Ayesha Perveen, Jalil ur Rehman, Muhammad Azhar Khan, Zaheer Abbas Gilani. Chin. Phys. B, 2019, 28(8): 088701.
[13]	Effects of CeO₂ and nano-ZrO₂ agents on the crystallization behavior and mechanism of CaO-Al₂O₃-MgO-SiO₂-based glass ceramics Yan Zhang(张艳), Yu Shi(石钰), Xuefeng Zhang(张雪峰), Fengxia Hu(胡凤霞), Jirong Sun(孙继荣), Tongyun Zhao(赵同云), Baogen Shen(沈保根). Chin. Phys. B, 2019, 28(7): 078107.
[14]	Recent progress of infrared photodetectors based on lead chalcogenide colloidal quantum dots Jinming Hu(胡津铭), Yuansheng Shi(史源盛), Zhenheng Zhang(张珍衡), Ruonan Zhi(智若楠), Shengyi Yang(杨盛谊), Bingsuo Zou(邹炳锁). Chin. Phys. B, 2019, 28(2): 020701.
[15]	Room-temperature strong coupling between dipolar plasmon resonance in single gold nanorod and two-dimensional excitons in monolayer WSe₂ Jinxiu Wen(温锦秀), Hao Wang(汪浩), Huanjun Chen(陈焕君), Shaozhi Deng(邓少芝), Ningsheng Xu(许宁生). Chin. Phys. B, 2018, 27(9): 096101.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

Cite this article:

Online attention