ACCURATE DETERMINATION OF FILM THICKNESS BY LOW-ANGLE X-RAY REFLECTION

doi:10.1088/1009-1963/9/11/007

Abstract

Abstract A modified Bragg law for straightforward determining the film thickness by low-angle X-ray reflection was derived based on the geometrical optical theory. We showed that this modified Bragg law and its inference formulae could be used to accurately determine the thickness of the monolayer or multilayer film. Furthermore, the modified Bragg law for determining the superlattice period presented earlier by others can be derived from the above modified Bragg law. The similar inference formulae were also given. The precision in determining the film thickness and/or superlattice period by the above formulae was discussed.

Keywords: film modified Bragg law X-ray reflection

Received: 03 March 2000
Revised: 03 July 2000
Accepted manuscript online:

PACS:	61.05.cm	(X-ray reflectometry (surfaces, interfaces, films))
	68.55.-a	(Thin film structure and morphology)
	68.65.Ac	(Multilayers)
	68.65.Cd	(Superlattices)

Fund: Project supported by the the Foundation for Key Research Programs of the China 9th 5-year Plan, from Chinese Academy of Sciences (Grant No. KJ951-AL-401) and the National Natural Science Foundation of China (Grant No. 19890310).

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Xu Ming (徐明), Yang Tao (杨涛), Yu Wen-xue (于文学), Yang Ning (杨宁), Liu Cui-xiu (刘翠秀), Mai Zhen-hong (麦振洪), Lai Wu-yan (赖武彦), Tao Kun (陶琨) ACCURATE DETERMINATION OF FILM THICKNESS BY LOW-ANGLE X-RAY REFLECTION 2000 Chinese Physics 9 833

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ACCURATE DETERMINATION OF FILM THICKNESS BY LOW-ANGLE X-RAY REFLECTION

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