Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C2H2 discharges

doi:10.1088/1674-1056/23/8/085202

Abstract A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth, charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene (C₂H₂) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic force on the spatial distribution of the nanoparticle density profiles is indispensable. In the present paper, we mainly focus on the influences of the gas flow rate, voltage, and gas pressure on the spatial distribution of the nanoparticle density. It appears that the resulting density profile of the 10-nm particles experiences a significant shift towards the upper showerhead electrode once the neutral equations are applied, and a serious shift is observed when increasing the gas flow rate. Thus, the flow of neutral gas can strongly influence the spatial distribution of the particles in the plasma.

Keywords: nanoparticle dynamics acetylene discharges numerical simulation

Received: 27 November 2013
Revised: 28 January 2014
Accepted manuscript online:

PACS:	52.27.Lw	(Dusty or complex plasmas; plasma crystals)
	52.65.-y	(Plasma simulation)
	52.80.Pi	(High-frequency and RF discharges)

Fund: Project supported by the China Postdoctoral Science Foundation (Grant No. 2012M511603), the National Natural Science Foundation of China (Grant Nos. 11105057 and 10775025), and the Fundamental Research Funds for the Central Universities of China (Grant No. DUT12LK39).

Corresponding Authors: Liu Xiang-Mei
E-mail: lxmjsc98@163.com

Cite this article:

Liu Xiang-Mei (刘相梅), Li Qi-Nan (李奇楠), Xu Xiang (徐翔) Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges 2014 Chin. Phys. B 23 085202

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Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C2H2 discharges

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Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges