| ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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Optimization of wide frequency range 6H-SiC MEMS chips for a fiber optic Fabry-Perot accelerometer |
| Mariano Mahissi(马依思·马里亚诺)1,2, Xinli Ma(马新莉)2,†, Weiming Cai(蔡卫明)2,‡, Xianmin Zhang(章献民)1, and Michel Dossou(多苏·米歇尔)3 |
1 College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China;
2 School of Information Science and Engineering, Ningbo Tech University, Ningbo 315100, China;
3 Research Unit in Photonics and Wireless Communications, LETIA/EPAC, University of Abomey-Calavi, 01 BP 526 Abomey-Calavi, Benin |
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Abstract Vibration detection using sensors with both wide working frequency range, good sensitivity, and other good performances is a topic of great interest in fields such as inertial navigation, deep-sea fishing boat engines condition monitoring, seismic monitoring, attitude, and heading reference system, $etc$. This paper investigates two 6H-SIC MEMS diaphragms, one triangular and the other square, used in a fiber optic Fabry-Perot (FP) accelerometer in an experimental scenario. The triangular chip shows a wide working frequency range of 630 Hz-5300 Hz, a natural frequency of 44.3 kHz, and a mechanical sensitivity of 0.154 nm/g. An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz-2300 Hz; a good sensitivity of 31.5 mV/g, a resonance frequency of 7873 Hz, an accuracy of 0.96% F.S., a frequency measurement error of 1.15%, and an excellent linearity of 0.9995.
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Received: 17 December 2024
Revised: 04 March 2025
Accepted manuscript online: 18 March 2025
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PACS:
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42.50.-p
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(Quantum optics)
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62.23.-c
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(Structural classes of nanoscale systems)
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61.46.-w
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(Structure of nanoscale materials)
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42.62.Eh
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(Metrological applications; optical frequency synthesizers for precision spectroscopy)
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| Fund: Project supported by the National Natural Science Foundation of China (Grant No. 32473216) and Ningbo Youth Science and Technology Innovation Leading Talent Project (Grant No. 2023QL004). |
Corresponding Authors:
Xinli Ma, Weiming Cai
E-mail: maxinli@tju.edu.cn;caiwm@nit.zju.edu.cn
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Cite this article:
Mariano Mahissi(马依思·马里亚诺), Xinli Ma(马新莉), Weiming Cai(蔡卫明), Xianmin Zhang(章献民), and Michel Dossou(多苏·米歇尔) Optimization of wide frequency range 6H-SiC MEMS chips for a fiber optic Fabry-Perot accelerometer 2025 Chin. Phys. B 34 074203
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