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A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches |
| Shan-Shan Wang(王姗姗)1,2,3,4, Qian-Nan Wu(吴倩楠)2,3,4,5,†, Yue-Sheng Gao(高跃升)1,2,3,4, Jian-Gang Yu(余建刚)1,2,3,4, Qian-Long Cao(曹钎龙)1,2,3,4, Lu-Lu Han(韩路路)1,2,3,4, and Meng-Wei Li(李孟委)1,2,3,4,‡ |
1 School of Instrument and Electronics, North University of China, Taiyuan 030051, China;
2 Nantong Institute of Intelligent Opto-Mechatronics, North University of China, Nantong 226000, China;
3 Center for Microsystem Intergration, North University of China, Taiyuan 030051, China;
4 Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China;
5 School of Science, North University of China, Taiyuan 030051, China |
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Abstract Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system (MEMS) single-pole double-throw (SPDT) switches are presented in this paper. The short-open-load-through (SOLT) calibration states can be completed simultaneously by using the MEMS electronic calibration, and the electronic calibrator can be reused 106 times. The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz-20 GHz, the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states, respectively, and the insertion loss in through (thru) state is less than 0.27 dB. On the other hand, the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm. Our results demonstrate that the calibrator with integrated radio-frequency microelectromechanical system (RF MEMS) switches can not only provide reduced size, loss, and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency. It has great potential applications in millimeter-wave measurement and testing technologies, such as device testing, vector network analyzers, and RF probe stations.
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Received: 20 February 2021
Revised: 15 March 2021
Accepted manuscript online: 24 March 2021
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PACS:
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85.85.+j
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(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
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87.80.Ek
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(Mechanical and micromechanical techniques)
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| Fund: Project supported by the National Defense Technology Industry Strong Foundation Project, China (Grant No. JCKY2018408B006), the Information System New Items Project, China (Grant Nos. 2018XW0026 and 2019XW0010), and the Information System Pre-research Project, China (Grant No. 31513060101). |
Corresponding Authors:
Qian-Nan Wu, Meng-Wei Li
E-mail: qiannanwoo@nuc.edu.cn;lmwnuc@163.com
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Cite this article:
Shan-Shan Wang(王姗姗), Qian-Nan Wu(吴倩楠), Yue-Sheng Gao(高跃升), Jian-Gang Yu(余建刚), Qian-Long Cao(曹钎龙), Lu-Lu Han(韩路路), and Meng-Wei Li(李孟委) A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches 2021 Chin. Phys. B 30 118501
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