Low-power electro-optic phase modulator based on multilayer graphene/silicon nitride waveguide

doi:10.1088/1674-1056/ab943b

Abstract Electro-optic modulator is a key component for on-chip optical signal processing. An electro-optic phase modulator based on multilayer graphene embedded in silicon nitride waveguide is demonstrated to fulfill low-power operation. Finite element method is adopted to investigate the interaction enhancement between the graphene flake and the optical mode. The impact of multilayer graphene on the performance of phase modulator is studied comprehensively. Simulation results show that the modulation efficiency improves with the increment of graphene layer number, as well as the modulation length. The 3-dB bandwidth of around 48 GHz is independent of graphene layer number and length. Compared to modulator with two-or four-layer graphene, the six-layer graphene/silicon nitride waveguide modulator can realize π phase shift at a low-power consumption of 14 fJ/bit when the modulation length is 240 μm.

Keywords: electro-optic modulator graphene silicon nitride waveguide

Received: 13 February 2020
Revised: 02 April 2020
Accepted manuscript online:

PACS:	42.79.Hp	(Optical processors, correlators, and modulators)
	42.79.Gn	(Optical waveguides and couplers)
	78.67.Wj	(Optical properties of graphene)

Fund: Project supported by the National Key Research and Development Program of China (Grant No. 2019YFB2203001), the National Natural Science Foundation of China (Grant Nos. 61675087, 61875069, and 61605057), and the Science and Technology Development Plan of Jilin Province, China (Grant No. JJKH20190118KJ).

Corresponding Authors: Xiaoqiang Sun
E-mail: sunxq@jlu.edu.cn

Cite this article:

Lanting Ji(姬兰婷), Wei Chen(陈威), Yang Gao(高阳), Yan Xu(许言), Chi Wu(吴锜), Xibin Wang(王希斌), Yunji Yi(衣云骥), Baohua Li(李宝华), Xiaoqiang Sun(孙小强), Daming Zhang(张大明) Low-power electro-optic phase modulator based on multilayer graphene/silicon nitride waveguide 2020 Chin. Phys. B 29 084207

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Low-power electro-optic phase modulator based on multilayer graphene/silicon nitride waveguide

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