Please wait a minute...
Chin. Phys. B, 2015, Vol. 24(11): 116201    DOI: 10.1088/1674-1056/24/11/116201
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Relationship between bias voltage and microstructureas well as properties of CrAlYN films

Fu Ying-Ying (付英英)a b, Li Hong-Xuan (李红轩)a, Ji Li (吉利)a, Liu Xiao-Hong (刘晓红)a, Liu Liu (刘流)c, Zhou Hui-Di (周惠娣)a, Chen Jian-Min (陈建敏)a
a State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China;
b University of Chinese Academy of Sciences, Beijing 100049, China;
c School of Life Science of Chemistry, Tianshui Normal University, Tianshui 741000, China
Abstract  In this work, a series of CrAlYN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages. The effects of bias voltage on microstructure and properties of the CrAlYN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher Al content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000 ℃, and good friction and wear properties at 600 and 800 ℃, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures (i.e., 200 and 400 ℃) due to the serious abrasive wear.
Keywords:  CrAlYN film      bias voltage      microstructure      properties  
Received:  11 January 2015      Revised:  24 July 2015      Accepted manuscript online: 
PACS:  62.20.Qp (Friction, tribology, and hardness)  
  68.55.-a (Thin film structure and morphology)  
  68.60.Dv (Thermal stability; thermal effects)  
Fund: Project supported by the National Basic Research Program of China (Grant No. 2013CB632302) and the National Natural Science Foundation of China (Grant No. 51175491).
Corresponding Authors:  Ji Li, Chen Jian-Min     E-mail:  jili@licp.cas.cn;Chenjm@licp.cas.cn

Cite this article: 

Fu Ying-Ying (付英英), Li Hong-Xuan (李红轩), Ji Li (吉利), Liu Xiao-Hong (刘晓红), Liu Liu (刘流), Zhou Hui-Di (周惠娣), Chen Jian-Min (陈建敏) Relationship between bias voltage and microstructureas well as properties of CrAlYN films 2015 Chin. Phys. B 24 116201

[1] Ling Z G, Li W J, Fu L Y, Zi L C and Ze Y S;2004 Chin. Phys. 13 1309
[2] Gao W M, Christ G, Walter L and Jan T;2002 Chin. Phys. 11 0132
[3] Barshilia H C, Selvakumar N, Deepthi B and Rajam K S;2006 Surf. Coat. Technol. 201 2193
[4] Brizuela M, Garcia-Luis A, Braceras I, Oñate J I, Sánchez-López J C, Martínez-Martínez D, López-Cartes C and Fernández A;2005 Surf. Coat. Technol. 200 192
[5] Spain E, Avelar-Batista J C, Letch M, Housden J and Lerga B;2005 Surf. Coat. Technol. 200 1507
[6] Chim Y C, Ding X Z, Zeng X T and Zhang S;2009 Thin Solid Films 517 4845
[7] Banakh O, Schmid P E, Sanjines R and Levy F;2003 Surf. Coat. Technol. 163 57
[8] Rovere F, Mayrhofer P H, Reinholdt A, Mayer J and Schneider J M;2008 Surf. Coat. Technol. 202 5870
[9] Rovere F and Mayrhofer P H;2008 J. Vac. Sci. Technol. A 26 29
[10] Reinhard C, Ehiasarian A P and Hovsepian P E;2007 Plasma Process. Polym. 4 S910
[11] Barshilia H C, Acharya S, Ghosh M, Suresh T N, Rajam K S, Konchady M S, Pai D M and Sankar J;2010 Vacuum 85 411
[12] Rojas T C, El Mrabet S, Domínguez-Meister S, Brizuela M, García-Luis A and Sánchez-López J C;2012 Surf. Coat. Technol. 211 104
[13] Qi Z B, Wu Z T and Wang Z C;2014 Surf. Coat. Technol. 259 146
[14] Lomello F, Sanchette F, Schuster F, Tabarant M and Billard A;2013 Surf. Coat. Technol. 224 77
[15] Wang Y X, Zhang S, Lee J W, Lew W S and Li B;2012 Surf. Coat. Technol. 206 5103
[16] Hong S G, Kwon S H, Kang S W and Kim K H;2008 Surf. Coat. Technol. 203 624
[17] Wang Y J, Li H X, Ji L, Liu X H, Wu Y X, Zhou H D and Chen J M;2012 Chin. Phys. B 21 016101
[18] Yu Z Z, Chun L X, Bin L J, Min S T, Tao Q and Hui Z C;2006 Chin. Phys. 15 2697
[19] Yu C Y, Tian L H, Wei Y H, Wang S B, Li T B and Xu B S;2009 Appl. Surf. Sci. 255 4033
[20] Lü Y H, Ji L, Liu X H, Li H X, Zhou H D and Chen J M;2012 Appl. Surf. Sci. 258 3864
[21] Soldán J, Neidhardt J, Sartory B, Kaindl R, Čerstvý R, Mayrhofer P H, Tessadri R, Polcik P, Lechthaler M and Mitterer C;2008 Surf. Coat. Technol. 202 3555
[22] Romero J, Gómez M A, Esteve J, Montalá F, Carreras L, Grifol M and Lousa A;2006 Thin Solid Films 515 113
[23] Kimura A, Kawate M, Hasegawa H and Suzuki T;2003 Surf. Coat. Technol. 169 367
[24] Kawate M, Kimura A and Suzuki T;2002 J. Vac. Sci. Technol. A 20 569
[25] Makino Y and Nogi K;1998 Surf. Coat. Technol. 98 1008
[26] Reiter A E, Derflinger V H, Hanselmann B, Bachmann T and Sartory B;2005 Surf. Coat. Technol. 200 2114
[27] Sugishima A, Kajioka H and Makino Y;1997 Surf. Coat. Technol. 97 590
[28] Ruan J L, Huang J L, Chen J S and Lii D F;2005 Surf. Coat. Technol. 200 1652
[29] Marta B, Alberto G L, Pablo C, Daniel G S, Roberto M and Javier-Jesús G;2009 Plasma Process. Polym. 6 S162
[30] Yu C Y, Wang S B, Tian L H, Li T B and Xu B S;2008 J. Mater. Sci. 44 300
[31] Zhang S, Bui X L, Jiang J R and Li X M;2005 Surf. Coat. Technol. 198 206
[32] Basnyat P, Luster B, Kertzman Z, Stadler S, Kohli P, Aouadi S, Xu J, Mishra S R, Eryilmaz O L and Erdemir A;2007 Surf. Coat. Technol. 202 1011
[33] Kong Q H, Ji L, Li H X, Liu X H, Wang Y J, Chen J M and Zhou H D;2011 Appl. Surf. Sci. 257 2269
[34] Lin J, Mishra B, Moore J J, Sproul W D and Rees J A;2007 Surf. Coat. Technol. 201 6960
[35] Tlili B, Mustapha N, Nouveau C, Benlatreche Y, Guillemot G and Lambertin M;2010 Vacuum 84 1067
[36] Tjong S C and Chen H;2004 Mater. Sci. Eng. R 45 1
[37] Daniel R, Martinschitz K J, Keckes J and Mitterer C;2010 Acta Mater. 58 2621
[38] Chou W J, Yu G P and Huang J H;2002 Surf. Coat. Technol. 149 7
[39] Ma C H, Huang J H and Chen H;2006 Surf. Coat. Technol. 200 3868
[40] Qi Z B, Sun P, Zhu F P, Wang Z C, Peng D L and Wu C H;2011 Surf. Coat. Technol. 205 3692
[41] Lin J, Mishra B, Moore J J and Sproul W D;2006 Surf. Coat. Technol. 201 4329
[42] Li Z, Munroe P, Jiang Z T, Zhao X L, Xu J, Zhou Z F, Jiang J Q, Fang F and Xie Z H;2012 Acta Mater. 60 5735
[43] Chen H W, Chan Y C, Lee J W and Duh J G;2011 Surf. Coat. Technol. 206 1571
[44] Bobzin K, Bagcivan N, Immich P, Bolz S, Cremer R and Leyendecker T;2008 Thin Solid Films 517 1251
[45] Tritremmel C, Daniel R, Mitterer C, Mayrhofer P H, Lechthaler M and Polcik P;2012 J. Vac. Sci. Technol. A 30 061501
[46] Xian G, Zhao H B, Fan H Y, Wang H and Du H;2014 Int. J. Refract. Met. H. 44 60
[47] Sánchez-López J C, Contreras A, Domínguez-Meister S, García-Luis A and Brizuela M;2014 Thin Solid Films 550 413
[48] Raveh A, Zukerman I, Shneck R, Avni R and Fried I;2007 Surf. Coat. Technol. 201 6136
[49] Hoerling A, Sjólén J, Willmann H, Larsson T, Odén M and Hultman L;2008 Thin Solid Film. 516 6421
[50] Chen Y I and Duh J G;1991 Surf. Coat. Technol. 48 163
[51] Lü Y H, Ji L, Liu X H, Li H X, Zhou H D and Chen J M;2012 Surf. Coat. Technol. 206 3961
[52] Lin J, Mishra B, Moore J J and Sproul W D;2008 Surf. Coat. Technol. 202 3272
[1] Mechanical enhancement and weakening in Mo6S6 nanowire by twisting
Ke Xu(徐克), Yanwen Lin(林演文), Qiao Shi(石桥), Yuequn Fu(付越群), Yi Yang(杨毅),Zhisen Zhang(张志森), and Jianyang Wu(吴建洋). Chin. Phys. B, 2023, 32(4): 046204.
[2] Advancing thermoelectrics by suppressing deep-level defects in Pb-doped AgCrSe2 alloys
Yadong Wang(王亚东), Fujie Zhang(张富界), Xuri Rao(饶旭日), Haoran Feng(冯皓然),Liwei Lin(林黎蔚), Ding Ren(任丁), Bo Liu(刘波), and Ran Ang(昂然). Chin. Phys. B, 2023, 32(4): 047202.
[3] Cascade excitation of vortex motion and reentrant superconductivity in flexible Nb thin films
Liping Zhang(张丽萍), Zuyu Xu(徐祖雨), Xiaojie Li(黎晓杰), Xu Zhang(张旭), Mingyang Qin(秦明阳), Ruozhou Zhang(张若舟), Juan Xu(徐娟), Wenxin Cheng(程文欣), Jie Yuan(袁洁), Huabing Wang(王华兵), Alejandro V. Silhanek, Beiyi Zhu(朱北沂), Jun Miao(苗君), and Kui Jin(金魁). Chin. Phys. B, 2023, 32(4): 047302.
[4] Structural evolution-enabled BiFeO3 modulated by strontium doping with enhanced dielectric, optical and superparamagneticproperties by a modified sol-gel method
Sharon V S, Veena Gopalan E, and Malini K A. Chin. Phys. B, 2023, 32(3): 037504.
[5] Effect of thickness of antimony selenide film on its photoelectric properties and microstructure
Xin-Li Liu(刘欣丽), Yue-Fei Weng(翁月飞), Ning Mao(毛宁), Pei-Qing Zhang(张培晴), Chang-Gui Lin(林常规), Xiang Shen(沈祥), Shi-Xun Dai(戴世勋), and Bao-An Song(宋宝安). Chin. Phys. B, 2023, 32(2): 027802.
[6] Surface structure modification of ReSe2 nanosheets via carbon ion irradiation
Mei Qiao(乔梅), Tie-Jun Wang(王铁军), Yong Liu(刘泳), Tao Liu(刘涛), Shan Liu(刘珊), and Shi-Cai Xu(许士才). Chin. Phys. B, 2023, 32(2): 026101.
[7] Tightly focused properties of a partially coherent radially polarized power-exponent-phase vortex beam
Kang Chen(陈康), Zhi-Yuan Ma(马志远), and You-You Hu(胡友友). Chin. Phys. B, 2023, 32(2): 024208.
[8] Effects of preparation parameters on growth and properties of β-Ga2O3 film
Zi-Hao Chen(陈子豪), Yong-Sheng Wang(王永胜), Ning Zhang(张宁), Bin Zhou(周兵), Jie Gao(高洁), Yan-Xia Wu(吴艳霞), Yong Ma(马永), Hong-Jun Hei(黑鸿君), Yan-Yan Shen(申艳艳), Zhi-Yong He(贺志勇), and Sheng-Wang Yu(于盛旺). Chin. Phys. B, 2023, 32(1): 017301.
[9] Optical and electrical properties of BaSnO3 and In2O3 mixed transparent conductive films deposited by filtered cathodic vacuum arc technique at room temperature
Jian-Ke Yao(姚建可) and Wen-Sen Zhong(钟文森). Chin. Phys. B, 2023, 32(1): 018101.
[10] Theoretical study of M6X2 and M6XX' structure (M = Au, Ag; X,X' = S, Se): Electronic and optical properties, ability of photocatalytic water splitting, and tunable properties under biaxial strain
Jiaqi Li(李嘉琪), Xinlu Cheng(程新路), and Hong Zhang(张红). Chin. Phys. B, 2022, 31(9): 097101.
[11] Slight Co-doping tuned magnetic and electric properties on cubic BaFeO3 single crystal
Shijun Qin(覃湜俊), Bowen Zhou(周博文), Zhehong Liu(刘哲宏), Xubin Ye(叶旭斌), Xueqiang Zhang(张雪强), Zhao Pan(潘昭), and Youwen Long(龙有文). Chin. Phys. B, 2022, 31(9): 097503.
[12] Microstructure and hardening effect of pure tungsten and ZrO2 strengthened tungsten under carbon ion irradiation at 700℃
Chun-Yang Luo(罗春阳), Bo Cui(崔博), Liu-Jie Xu(徐流杰), Le Zong(宗乐), Chuan Xu(徐川), En-Gang Fu(付恩刚), Xiao-Song Zhou(周晓松), Xing-Gui Long(龙兴贵), Shu-Ming Peng(彭述明), Shi-Zhong Wei(魏世忠), and Hua-Hai Shen(申华海). Chin. Phys. B, 2022, 31(9): 096102.
[13] Effect of spatial heterogeneity on level of rejuvenation in Ni80P20 metallic glass
Tzu-Chia Chen, Mahyuddin KM Nasution, Abdullah Hasan Jabbar, Sarah Jawad Shoja, Waluyo Adi Siswanto, Sigiet Haryo Pranoto, Dmitry Bokov, Rustem Magizov, Yasser Fakri Mustafa, A. Surendar, Rustem Zalilov, Alexandr Sviderskiy, Alla Vorobeva, Dmitry Vorobyev, and Ahmed Alkhayyat. Chin. Phys. B, 2022, 31(9): 096401.
[14] Two-dimensional Sb cluster superlattice on Si substrate fabricated by a two-step method
Runxiao Zhang(张润潇), Zi Liu(刘姿), Xin Hu(胡昕), Kun Xie(谢鹍), Xinyue Li(李新月), Yumin Xia(夏玉敏), and Shengyong Qin(秦胜勇). Chin. Phys. B, 2022, 31(8): 086801.
[15] Relativistic calculations on the transition electric dipole moments and radiative lifetimes of the spin-forbidden transitions in the antimony hydride molecule
Yong Liu(刘勇), Lu-Lu Li(李露露), Li-Dan Xiao(肖利丹), and Bing Yan(闫冰). Chin. Phys. B, 2022, 31(8): 083101.
No Suggested Reading articles found!