Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

doi:10.1088/1674-1056/23/4/048102

Abstract In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N₂ mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron microscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.

Keywords: arc ion plating Ti-C-N film nitrogen flow rate microstructure

Received: 26 July 2013
Revised: 22 September 2013
Accepted manuscript online:

PACS:	81.15.Jj	(Ion and electron beam-assisted deposition; ion plating)
	68.55.-a	(Thin film structure and morphology)
	68.60.Bs	(Mechanical and acoustical properties)
	61.05.cj	(X-ray absorption spectroscopy: EXAFS, NEXAFS, XANES, etc.)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51271047).

Corresponding Authors: Zhang Lin
E-mail: linzh1817@gmail.com

About author: 81.15.Jj; 68.55.-a; 68.60.Bs; 61.05.cj

Cite this article:

Zhang Lin (张林), Ma Guo-Jia (马国佳), Lin Guo-Qiang (林国强), Ma He (马贺), Han Ke-Chang (韩克昌) Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating 2014 Chin. Phys. B 23 048102

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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

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