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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating |
Zhang Lin (张林)a b, Ma Guo-Jia (马国佳)b, Lin Guo-Qiang (林国强)a, Ma He (马贺)b, Han Ke-Chang (韩克昌)a |
a Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China; b Science and Technology on Power Beam Processes Laboratory, Beijing Aeronautical ManufacturingTechnology Research Institute, Beijing 100024, China |
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Abstract In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron microscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.
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Received: 26 July 2013
Revised: 22 September 2013
Accepted manuscript online:
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PACS:
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81.15.Jj
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(Ion and electron beam-assisted deposition; ion plating)
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68.55.-a
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(Thin film structure and morphology)
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68.60.Bs
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(Mechanical and acoustical properties)
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61.05.cj
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(X-ray absorption spectroscopy: EXAFS, NEXAFS, XANES, etc.)
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Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51271047). |
Corresponding Authors:
Zhang Lin
E-mail: linzh1817@gmail.com
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About author: 81.15.Jj; 68.55.-a; 68.60.Bs; 61.05.cj |
Cite this article:
Zhang Lin (张林), Ma Guo-Jia (马国佳), Lin Guo-Qiang (林国强), Ma He (马贺), Han Ke-Chang (韩克昌) Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating 2014 Chin. Phys. B 23 048102
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