Preparation and modification of VO2 thin film on R-sapphire substrate By Rapid Thermal Process

Abstract

Abstract 首次利用磁控溅射附加快速热处理方法(RTP)在R-面蓝宝石基底上制备了具有相变性能的二氧化钒薄膜，并利用四探针和太赫兹时域频谱系统(THz-TDS)研究了所制备薄膜相变过程中的电学和太赫兹光学特性。利用XRD、XPS、AFM和SEM对薄膜的结晶结构、价态、表面形貌进行分析.实验结果表明，金属钒薄膜氧气气氛下热处理形成的二氧化钒薄膜，其相变特性在经过氮气改性热处理后明显提升。二氧化钒结晶状态和成分有所提高并且薄膜表面变得更加致密均匀。相变前后薄膜电阻变化接近3个数量级，热致宽度仅为2℃，太赫兹透射率在热激励和光激励下分别降低64%和60%。

Keywords: RTP VO2 thin film phase transition modification

Received: 05 September 2013
Revised: 24 October 2013
Published: 07 November 2013

Fund: Natural Science Foundation of Beijing;Natural Science Foundation of Beijing PHR

Cite this article:

Preparation and modification of VO2 thin film on R-sapphire substrate By Rapid Thermal Process Chin. Phys. B 0

[1]	Novel structures and mechanical properties of Zr₂N: Ab initio description under high pressures Minru Wen(文敏儒), Xing Xie(谢兴), Zhixun Xie(谢植勋), Huafeng Dong(董华锋), Xin Zhang(张欣), Fugen Wu(吴福根), and Chong-Yu Wang(王崇愚). Chin. Phys. B, 2021, 30(1): 016403.
[2]	Ab initio study on crystal structure and phase stability of ZrC₂ under high pressure Yong-Liang Guo(郭永亮), Jun-Hong Wei(韦俊红), Xiao Liu(刘潇), Xue-Zhi Ke(柯学志), and Zhao-Yong Jiao(焦照勇). Chin. Phys. B, 2021, 30(1): 016101.
[3]	Temperature-induced phase transition of two-dimensional semiconductor GaTe Xiaoyu Wang(王啸宇), Xue Wang(王雪), Hongshuai Zou(邹洪帅), Yuhao Fu(付钰豪), Xin He(贺欣), and Lijun Zhang(张立军). Chin. Phys. B, 2021, 30(1): 016402.
[4]	Fast and accurate determination of phase transition temperature via individual generalized canonical ensemble simulation Ming-Zhe Shao(邵明哲), Yan-Ting Wang(王延颋), Xin Zhou(周昕). Chin. Phys. B, 2020, 29(8): 080505.
[5]	Theoretical study on martensitic-type transformation path from rutile phase to α-PbO₂ phase of TiO₂ Wen-Xuan Wang(王文轩), Zhen-Yi Jiang(姜振益), Yan-Ming Lin(林彦明), Ji-Ming Zheng(郑继明), Zhi-Yong Zhang(张志勇). Chin. Phys. B, 2020, 29(7): 076101.
[6]	Metamagnetic transition and reversible magnetocaloric effect in antiferromagnetic DyNiGa compound Yan-Hong Ding(丁燕红), Fan-Zhen Meng(孟凡振), Li-Chen Wang(王利晨), Ruo-Shui Liu(刘若水), Jun Shen(沈俊). Chin. Phys. B, 2020, 29(7): 077501.
[7]	Thickness-dependent magnetic order and phase transition in V₅S₈ Rui-Zi Zhang(张瑞梓), Yu-Yang Zhang(张余洋), Shi-Xuan Du(杜世萱). Chin. Phys. B, 2020, 29(7): 077504.
[8]	Construction of monolayer IrTe₂ and the structural transition under low temperatures Aiwei Wang(王爱伟), Ziyuan Liu(刘子媛), Jinbo Pan(潘金波), Qiaochu Li(李乔楚), Geng Li(李更), Qing Huan(郇庆), Shixuan Du(杜世萱), Hong-Jun Gao(高鸿钧). Chin. Phys. B, 2020, 29(7): 078102.
[9]	Ab initio studies on ammonium iodine under high pressure Mengya Lu(鲁梦雅), Yanping Huang(黄艳萍), Fubo Tian(田夫波), Da Li(李达), Defang Duan(段德芳), Qiang Zhou(周强), Tian Cui(崔田). Chin. Phys. B, 2020, 29(5): 053104.
[10]	Electronic structure and phase transition engineering in NbS₂: Crucial role of van der Waals interactions Wei Wang(王威), Wen Lei(雷文), Xiaojun Zheng(郑晓军), Huan Li(黎欢), Xin Tang(唐鑫), Xing Ming(明星). Chin. Phys. B, 2020, 29(5): 056201.
[11]	Tunable deconfined quantum criticality and interplay of different valence-bond solid phases Bowen Zhao(赵博文), Jun Takahashi, Anders W. Sandvik. Chin. Phys. B, 2020, 29(5): 057506.
[12]	Growth and structural characteristics of metastable β-In₂Se₃ thin films on H-terminated Si(111) substrates by molecular beam epitaxy Yi-Fan Shen(沈逸凡), Xi-Bo Yin(尹锡波), Chao-Fan Xu(徐超凡), Jing He(贺靖), Jun-Ye Li(李俊烨), Han-Dong Li(李含冬), Xiao-Hong Zhu(朱小红), Xiao-Bin Niu(牛晓滨). Chin. Phys. B, 2020, 29(5): 056402.
[13]	Dissipative quantum phase transition in a biased Tavis-Cummings model Zhen Chen(陈臻), Yueyin Qiu(邱岳寅), Guo-Qiang Zhang(张国强), Jian-Qiang You(游建强). Chin. Phys. B, 2020, 29(4): 044201.
[14]	Developing cold-resistant high-adhesive electronic substrate for WIMPs detectors at CDEX Yuanyuan Liu(刘圆圆), Jianping Cheng(程建平), Pan Pang(庞盼), Bin Liao(廖斌), Bin Wu(吴彬), Minju Ying(英敏菊), Fengshou Zhang(张丰收), Lin Chen(陈琳), Shasha Lv(吕沙沙), Yandong Liu(刘言东), Tianxi Sun(孙天希). Chin. Phys. B, 2020, 29(4): 045203.
[15]	Morphological modifications of C₆₀ crystal rods under hydrothermal conditions Ming-Run Du(杜明润), Shi-Xin Liu(刘士鑫), Jia-Jun Dong(董家君), Ze-Peng Li(李泽朋), Ming-Chao Wang (王明超), Tong Wei(魏通), Qing-Jun Zhou(周青军), Xiong Yang(杨雄), and Peng-fei Shen(申鹏飞). Chin. Phys. B, 2020, 29(12): 128102.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Shared

Discussed

Metrics
Related Articles