Tuning nano-pillar array for enhancing the photoluminescence extraction efficiency of GaN-based light-emitting diodes

doi:10.1088/1674-1056/22/4/048101

Abstract We demonstrate the fabrication of hexagonal nano-pillar arrays at the surface of GaN-based light-emitting diodes (LEDs) by nanosphere lithography. By varying the oxygen plasma etching time, we could tune the size and shape of the pillar. The nano-pillar has a truncated cone shape. The nano-pillar array serves as a gradual effective refractive index matcher, which reduces the reflection and increases light cone. It is found that the patterned surface absorbs more pumping light. To compare extraction efficiencies of LEDs, it is necessary to normalize the photoluminescence power spectrum with total absorption rate under fixed pumping power, then we could obtain the correct enhancement factor of the photoluminescence extraction efficiency and optimized structure. The highest enhancement factor of the extraction efficiency is 10.6.

Keywords: colloidal lithography light-emitting diode extraction efficiency

Received: 18 July 2012
Revised: 12 October 2012
Accepted manuscript online:

PACS:	81.05.-t	(Specific materials: fabrication, treatment, testing, and analysis)
	85.30.-z	(Semiconductor devices)
	42.55.Tv	(Photonic crystal lasers and coherent effects)

Fund: Project supported by the the National Natural Science Foundation of China (Grant Nos. 10774195, U0834001, 10974263, 11174374, and 10725420), the Key Program of Ministry of Education, China (Grant No. 309024), the New Century Excellent Talents in University, and the National Basic Research Program of China (Grant No. 2010CB923200).

Corresponding Authors: Jin Chong-Jun, Zhang Bai-Jun
E-mail: jinchjun@mail.sysu.edu.cn; zhbaij@mail.sysu.edu.cn

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Chen Xia (陈夏), Liang Zhu-Hong (梁柱洪), Chen Zhan-Xu (陈湛旭), Yang Wei-Ming (杨伟明), Chen Tu-Fu (陈土福), Jin Chong-Jun (金崇君), Zhang Bai-Jun (张佰君) Tuning nano-pillar array for enhancing the photoluminescence extraction efficiency of GaN-based light-emitting diodes 2013 Chin. Phys. B 22 048101

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Tuning nano-pillar array for enhancing the photoluminescence extraction efficiency of GaN-based light-emitting diodes

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