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Fabrication of Al air-bridge on coplanar waveguide |
Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬) |
National Laboratory of Solid State Microstructures, School of Physics, Nanjing University, Nanjing 210093, China |
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Abstract Superconducting coplanar waveguide (CPW) can be widely used as two-dimensional (2D) resonator, transmission line or feedline, providing an important component for superconducting quantum circuit which is a promising candidate for quantum information processing. Due to the discontinuities and asymmetries in the ground planes, CPW usually exhibits the spurious resonance, which is a common source of decoherence in circuit quantum electrodynamics experiments. To mitigate the spurious resonance, we fabricated superconducting aluminum air-bridges on Nb CPW. The fabricated air-bridges are approximately 3 μ high and up to 120 μ long. Compared with other methods, the fabrication procedures of our air-bridges are simpler, and the air-bridge can withstand strong ultrasound.
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Received: 04 May 2018
Revised: 21 June 2018
Accepted manuscript online:
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PACS:
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03.67.Lx
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(Quantum computation architectures and implementations)
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42.82.Cr
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(Fabrication techniques; lithography, pattern transfer)
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85.25.-j
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(Superconducting devices)
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Fund: Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001). |
Corresponding Authors:
Hai-Feng Yu
E-mail: hfyu@nju.edu.cn
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Cite this article:
Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬) Fabrication of Al air-bridge on coplanar waveguide 2018 Chin. Phys. B 27 100310
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