Fabrication and properties of high performance YBa2Cu3O7-δ radio frequency SQUIDs with step-edge Josephson junctions

doi:10.1088/1674-1056/23/9/097401

Abstract We describe the fabrication of high performance YBa₂Cu₃O_7-δ (YBCO) radio frequency (RF) superconducting quantum interference devices (SQUIDs), which were prepared on 5 mm×5 mm LaAlO₃ (LAO) substrates by employing step-edge junctions (SEJs) and in flip-chip configuration with 12 mm×12 mm resonators. The step in the substrate was produced by Ar ion etching with step angles ranging from 47° to 61°, which is steep enough to ensure the formation of grain boundaries (GBs) at the step edges. The YBCO film was deposited using the pulsed laser deposition (PLD) technique with a film thickness half of the height of the substrate step. The inductance of the SQUID washer was designed to be about 157 pH. Under these circumstances, high performance YBCO RF SQUIDs were successfully fabricated with a typical flux-voltage transfer ratio of 83 mV/Φ ₀, a white flux noise of 29 μΦ ₀/√Hz, and the magnetic field sensitivity as high as 80 fT/√Hz. These devices have been applied in magnetocardiography and geological surveys.

Keywords: superconducting quantum interference device (SQUID) YBa₂Cu₃O_7-δ (YBCO) step-edge junction radio frequency

Received: 25 December 2013
Revised: 08 April 2014
Accepted manuscript online:

PACS:	74.72.-h	(Cuprate superconductors)
	68.37.Ps	(Atomic force microscopy (AFM))
	74.78.-w	(Superconducting films and low-dimensional structures)
	85.25.Dq	(Superconducting quantum interference devices (SQUIDs))

Fund: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00106), the National Natural Science Foundation of China (Grant No. 11074008), and the Research Fund for the Doctoral Program of Higher Education, China (Grant No. 20100001120006).

Corresponding Authors: Ma Ping
E-mail: maping@pku.edu.cn

Cite this article:

Liu Zheng-Hao (刘政豪), Wei Yu-Ke (魏玉科), Wang Da (王达), Zhang Chen (张琛), Ma Ping (马平), Wang Yue (王越) Fabrication and properties of high performance YBa₂Cu₃O_7-δ radio frequency SQUIDs with step-edge Josephson junctions 2014 Chin. Phys. B 23 097401

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Fabrication and properties of high performance YBa2Cu3O7-δ radio frequency SQUIDs with step-edge Josephson junctions

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Fabrication and properties of high performance YBa₂Cu₃O_7-δ radio frequency SQUIDs with step-edge Josephson junctions