INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Prev
Next
|
|
|
Formation of ZnGa2O4 films by multilayer deposition and subsequent thermal annealing |
Yan Jin-Liang (闫金良), Zhao Yin-Nü (赵银女), Li Chao (李超) |
School of Physics and Optoelectronic Engineering, Ludong University, Yantai 264025, China |
|
|
Abstract The Ga2O3/ZnO multilayer films are deposited on quartz substrates by magnetron sputtering, the thickness values of Ga2O3 layers are in a range of 19 nm-2.5 nm and the thickness of ZnO layer is a constant of 1 nm. Formation of spinel ZnGa2O4 film is achieved via the annealing of the Ga2O3/ZnO multilayer film. The influences of original Ga2O3 sublayer thickness on the optical and structural properties of Ga2O3/ZnO multilayer films and annealed films are studied. With the decrease of the thickness of Ga2O3 sublayer, the optical band-gap of Ga2O3/ZnO multilayer film decreases, the intensity of UV emission diminishes and the intensity of violet emission increases. The annealed film displays the enlarged optical band gap and the quenched violet emission. UV fluorescence bands are observed from Ga2O3 and ZnGa2O4.
|
Received: 22 August 2013
Revised: 22 September 2013
Accepted manuscript online:
|
PACS:
|
81.15.-z
|
(Methods of deposition of films and coatings; film growth and epitaxy)
|
|
68.55.-a
|
(Thin film structure and morphology)
|
|
78.20.-e
|
(Optical properties of bulk materials and thin films)
|
|
68.60.-p
|
(Physical properties of thin films, nonelectronic)
|
|
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 10974077), the InnovationProject of Shandong Graduate Education, China (Grant No. SDYY13093), and the Natural Science Foundation of Shandong Province, China (Grant No. ZR2010AL026). |
Corresponding Authors:
Yan Jin-Liang
E-mail: yanjinliang8@sina.com
|
About author: 81.15.-z; 68.55.-a; 78.20.-e; 68.60.-p |
Cite this article:
Yan Jin-Liang (闫金良), Zhao Yin-Nü (赵银女), Li Chao (李超) Formation of ZnGa2O4 films by multilayer deposition and subsequent thermal annealing 2014 Chin. Phys. B 23 048105
|
[1] |
Omata T, Ueda N, Ueda K and Kawazoe H 1994 Appl. Phys. Lett. 64 1077
|
[2] |
Choi H W, Hong B J, Lee S K, Kim K H and Park Y S 2007 J. Lumin. 126 359
|
[3] |
Zhang W W, Zhang J Y, Li Y, Chen Z Y and Wang T M 2010 Appl. Surf. Sci. 256 4702
|
[4] |
Park K W, Yun Y H and Choi S C 2006 Solid State Ionics 177 1875
|
[5] |
Yi S S, Kim I W, Bae J S, Moon B K, Kim S B and Jeong J H 2002 Mater. Lett. 57 904
|
[6] |
Bhattacharya P, Das R R and Katiyar R S 2003 Appl. Phys. Lett. 83 2010
|
[7] |
Bhattacharya P, Das R R and Katiyar R S 2004 Thin Solid Films 447-448 564
|
[8] |
Zhang D H, Wang Q P and Xue Z Y 2003 Acta Phys. Sin. 52 1484 (in Chinese)
|
[9] |
Li C, Yan J L, Zhang L Y and Zhao G 2012 Chin. Phys. B 21 127104
|
[10] |
Zhang L Y, Yan J L, Zhang Y J and Li T 2012 Chin. Phys. B 21 067102
|
[11] |
Khan W S and Cao C 2010 J. Cryst. Growth 312 1838
|
[12] |
Yang T L, Zhang Z S, Li Y H, Lü M S, Song S M, Wu Z H, Yan J C and Han S H 2009 Appl. Surf. Sci. 255 3544
|
[13] |
Zhou X T, Heigl F, Ko J Y P, Murphy M W, Zhou J G, Regier T, Blyth R I R and Sham T K 2007 Phys. Rev. B 75 125303
|
[14] |
Lee J, Li Z, Hodgson M, Metson J, Asadov A and Gao W 2004 Curr. Appl. Phys. 4 398
|
[15] |
Zhang Y J, Yan J L, Li Q S, Qu C, Zhang L Y and Xie W F 2011 Mater. Sci. Eng. B 176 846
|
[16] |
Zhang S B, Wei S H and Zunger A 2001 Phys. Rev. B 63 075205
|
[17] |
Fang Z B, Gong H X, Liu X Q, Xu D Y, Huang C M and Wang Y Y 2003 Acta Phys. Sin. 52 1748 (in Chinese)
|
[18] |
Zhang L L, Guo C X, Chen J G and Hu J T 2005 Chin. Phys. 14 586
|
[19] |
Bylander E G 1978 J. Appl. Phys. 49 1188
|
[20] |
Look D C and Hemsky J W 1999 Phys. Rev. Lett. 82 2552
|
[21] |
Gavryushin V, Raciukaitis G, Juodzbalis D, Kazlaulskas A and Kubertivicius V 1994 J. Cryst. Growth 138 924
|
[22] |
Ueda N, Hosono H, Waseda R and Kawazoe H 1997 Appl. Phys. Lett. 70 3561
|
[23] |
Jeong I K, Park H L and Mho S I 1998 Solid State Commun. 105 179
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|