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Special Issue:
SPECIAL TOPIC — Ion beam modification of materials and applications
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| SPECIAL TOPIC—Ion beam modification of materials and applications |
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Optical spectroscopy study of damage evolution in 6H-SiC by H$_{2}^{ + }$ implantation |
| Yong Wang(王勇)1, Qing Liao(廖庆)2, Ming Liu(刘茗)3, Peng-Fei Zheng(郑鹏飞)3, Xinyu Gao(高新宇)1, Zheng Jia(贾政)1, Shuai Xu(徐帅)2, and Bing-Sheng Li(李炳生)2,4,† |
1 China Institute for Radiation Protection, Taiyuan 030006, China;
2 State Key Laboratory for Environment-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang 621010, China;
3 Southwestern Institute of Physics, Chengdu 610041, China;
4 Engineering Research Center of Biomass Materials, Ministry of Education, Southwest University of Science and Technology, Mianyang 621010, China |
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Abstract Lattice defects induced by ion implantation into SiC have been widely investigated in the decades by various techniques. One of the non-destructive techniques suitable to study the lattice defects in SiC is the optical characterization. In this work, confocal Raman scattering spectroscopy and photoluminescence spectrum have been used to study the effects of 134-keV H$_{2}^{ + }$ implantation and thermal treatment in the microstructure of 6H-SiC single crystal. The radiation-induced changes in the microstructure were assessed by integrating Raman-scattering peaks intensity and considering the asymmetry of Raman-scattering peaks. The integrated intensities of Raman scattering spectroscopy and photoluminescence spectrum decrease with increasing the fluence. The recovery of the optical intensities depends on the combination of the implantation temperature and the annealing temperature with the thermal treatment from 700 ℃ to 1100 ℃. The different characterizations of Raman scattering spectroscopy and photoluminescence spectrum are compared and discussed in this study.
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Received: 22 January 2021
Revised: 21 February 2021
Accepted manuscript online: 25 February 2021
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PACS:
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61.80.-x
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(Physical radiation effects, radiation damage)
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61.80.Jh
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(Ion radiation effects)
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78.30.-j
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(Infrared and Raman spectra)
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78.55.-m
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(Photoluminescence, properties and materials)
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| Fund: Project supported by the National Natural Science Foundation of China (Grant No. 12075194), the Sichuan Provincial Science and Technology Program, China (Grant No. 2020ZYD055), and the National Key Research and Development Program of China (Grant No. 2017YFE0301306). |
Corresponding Authors:
Bing-Sheng Li
E-mail: libingshengmvp@163.com
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Cite this article:
Yong Wang(王勇), Qing Liao(廖庆), Ming Liu(刘茗), Peng-Fei Zheng(郑鹏飞), Xinyu Gao(高新宇), Zheng Jia(贾政), Shuai Xu(徐帅), and Bing-Sheng Li(李炳生) Optical spectroscopy study of damage evolution in 6H-SiC by H$_{2}^{ + }$ implantation 2021 Chin. Phys. B 30 056106
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[1] Park C H, Cheong B H, Lee K H and Chang K J 1994 Phys. Rev. B 49 4485
[2] Snead L L, Nozawa T, Katoh Y, Byun T S, Kondo S and Petti D A 2007 J. Nucl. Mater. 371 329
[3] Tan L, Allen T R, Hunn J D and Miller J H 2008 J. Nucl. Mater. 372 400
[4] Jiang W, Weber W J, Thevuthasan S and Grotzschel R 2000 Nucl. Instrum. Method B 166-167 374
[5] Li B S, Wang Z G and Jin Y F 2013 Nucl. Instrun. Method B 316 239
[6] Zhang L and Li B S 2017 Physica B 508 104
[7] Daghbouj N, Li B S, Callisti M, Sen H S, Jin J, Ou X, Karlik M and Polcar T 2020 Acta Mater. 188 609
[8] Daghbouj N and Li B S, Karlik M and Delcemy A 2019 Appl. Surf. Sci. 466 141
[9] Gregory R B, Wetteroth T A, Wilson S R, Holland O W and Thomas D K 1999 Appl. Phys. Lett. 75 2623
[10] Jia Q, Huang K, You T G, Yi A L, Lin J J, Zhang S B, Zhou M, Zhang B, Yu W J, Ou X and Wang X 2018 Appl. Phys. Lett. 112 192102
[11] Zhang H H, Zhang C H, Li B S, Zhou L H, Yang Y T and Fu Y C 2009 Acta Phys. Sin. 58 3302 (in Chinese)
[12] Li B S, Zhang C H, Zhang H H, Shibayama T and Yang Y T 2011 Vacuum 86 452
[13] Du Y Y, Li B S, Wang Z G, Sun J R, Yao C F, Pang L L, Zhu Y B, Cui M H, Zhang H P, Li Y F, Wang J, Zhu H P, Song P and Wang D 2014 Acta Phys. Sin. 63 216101 (in Chinese)
[14] Li B S, Liu H P, Kang L, Zhang T M, Xu L J and Xiong An L 2019 J. Eur. Cer. Soc. 39 4307
[15] Zhang L M, Jiang W L, Pan C L, Fadanelli R C, Ai W S, Chen L and Wang T S 2019 J. Raman Spectroscopy 50 1197
[16] Heliou R, Brebner J L and Roorda S 2001 Nucl. Instrum. Method B 175-177 268
[17] http://www.srim.org
[18] Harima H 2006 Microelectronic Eng. 83 126
[19] Kawai Y, Maeda T, Nakamura Y, Sakurai Y, Iwaya M, Kamiyama S, Amano H, Akasaki I, Yochimoto M, Furusho T, Kinoshita H and Shiomi H 2006 Mater. Sci. Forum 527-529 263
[20] Nakashima S and Harima H 1997 Phys. Stat. Sol. (a) 162 39
[21] Sorieul S, Costantini J M, Gosmain L, Thome L and Grob J J 2006 J. Phys.: Condens. Matter 18 5235
[22] Huang X, Ninio F, Brown L J and Prawer S 1995 J. Appl. Phys. 77 5910
[23] Wang P F, Huang L, Zhu W and Ruan Y F 2012 Solid State Commun. 152 887
[24] Li B S, Krsjak V, Degmova J, Wang Z G, Shen T L, Li H, Sojak S, Slugen V and Kawasuso A 2020 J. Nucl. Mater. 535 152180
[25] Liu Y Z, Li B S and Zhang L 2017 Chin. Phys. Lett. 34 052801
[26] Han W T and Li B S 2018 J. Nucl. Mater. 504 161
[27] Liu H P, L i J Y and Li B S 2018 Chin. Phys. Lett. 35 096103
[28] Gao F, Weber W J, Posselt M and Belko V 2004 Phys. Rev. B 69 245205
[29] Richter H, Wang Z P and Ley L 1981 Solid State Commun. 39 625
[30] Zhang Y, Weber W J, Jiang W, Hallen A and Possnert G 2002 J. Appl. Phys. 91 6388
[31] Jagielski J and Thome L 2009 Appl. Phys. A 97 147 |
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