CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Strain relaxation and optical properties of etched In0.19Ga0.81N nanorod arrays on the GaN template |
Zhang Dong-Yan (张东炎)a b, Zheng Xin-He (郑新和)a, Li Xue-Fei (李雪飞)a, Wu Yuan-Yuan (吴渊渊)a b, Wang Hui (王辉)a, Wang Jian-Feng (王建峰)a, Yang Hui (杨辉)a |
a Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215125, China; b Graduate University of the Chinese Academy of Sciences, Beijing 100190, China |
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Abstract InGaN/GaN epilayers, which are grown on sapphire substrates by metal-organic chemical-vapour deposition (MOCVD) method, are formed into nanorod arrays using inductively coupled plasma etching via self-assembled Ni nanomasks. The formation of nanorod arrays eliminates the tilt of the InGaN (0002) crystallographic plane with respect to its GaN bulk layer. Photoluminescence results show an apparent S-shaped dependence on temperature. The light extraction efficiency and intensity of photoluminescence emission at low temperature less than 30 K for the nanorod arrays are enhanced by the large surface area, which increases the quenching effect because of high density of surface states for the temperature above 30 K. Additionally, a red-shift for the InGaN/GaN nanorod arrays is observed due to the strain relaxation, which is confirmed by reciprocal space mapping measurements.
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Received: 20 December 2011
Revised: 09 February 2012
Accepted manuscript online:
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PACS:
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78.66.Fd
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(III-V semiconductors)
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78.67.-n
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(Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures)
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74.25.Gz
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(Optical properties)
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Fund: Project supported by the SONY-SINANO Joint Project (Grant No. Y1AAQ11001), the Suzhou Solar Cell Research Project, China (Grant No. ZXJ0903), and the International S & T Cooperation Projects (SINO-Japan), the Science Fund of the Ministry of Science and Technology of the People's Republic of China (Grant No. 2010DFA22770). |
Corresponding Authors:
Zheng Xin-He
E-mail: xhzheng2009@sinano.ac.cn
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Cite this article:
Zhang Dong-Yan (张东炎), Zheng Xin-He (郑新和), Li Xue-Fei (李雪飞), Wu Yuan-Yuan (吴渊渊), Wang Hui (王辉), Wang Jian-Feng (王建峰), Yang Hui (杨辉) Strain relaxation and optical properties of etched In0.19Ga0.81N nanorod arrays on the GaN template 2012 Chin. Phys. B 21 087802
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