CMOS compatible highly efficient grating couplers with a stair-step blaze profile
Zhou Liang(周亮)a), Li Zhi-Yong(李智勇)a)†, Hu Ying-Tao(胡应涛)a), Xiong Kang(熊康)a), Fan Zhong-Chao(樊中朝)b), Han Wei-Hua(韩伟华)b), Yu Yu-De (俞育德)a), and Yu Jin-Zhong (余金中)a)
aState Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; bEngineering Research Center for Semiconductor Integrated Technology, Institute of semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract A novel grating coupler with a stair-step blaze profile is proposed. The coupler is a CMOS process compatible device and can be used for light coupling in optical communication. The blaze profile can be optimized to obtain a high efficiency of 66.7% for the out-of-plane coupling at the centre wavelength of 1595 nm with a 1 dB bandwidth of 41 nm. Five key parameters of the stair-step blaze grating and their effects on the coupling are discussed for the application in L band telecommunication.
Zhou Liang(周亮), Li Zhi-Yong(李智勇), Hu Ying-Tao(胡应涛), Xiong Kang(熊康), Fan Zhong-Chao(樊中朝), Han Wei-Hua(韩伟华), Yu Yu-De (俞育德), and Yu Jin-Zhong (余金中) CMOS compatible highly efficient grating couplers with a stair-step blaze profile 2011 Chin. Phys. B 20 074212
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