Development of x-ray scintillator functioning also as an analyser grating used in grating-based x-ray differential phase contrast imaging

doi:10.1088/1674-1056/20/4/042901

Abstract In order to push the grating-based phase contrast imaging system to be used in hospital and laboratories, this paper designs and develops a novel structure of x-ray scintillator functioning also as an analyser grating, which has been proposed for grating-based x-ray differential phase contrast imaging. According to this design, the scintillator should have a periodical structure in one dimension with the pitch equaling the period of self-image of the phase grating at the Talbot distance, where one half of the pitch is pixellated and is made of x-ray sensitive fluorescent material, such as CsI(Tl), and the remaining part of the pitch is made of x-ray insensitive material, such as silicon. To realize the design, a deep pore array with a high aspect ratio and specially designed grating pattern are successfully manufactured on 5 inch silicon wafer by the photo-assisted electrochemical etching method. The related other problems, such as oxidation-caused geometrical distortion, the filling of CsI(Tl) into deep pores and the removal of inside bubbles, have been overcome. Its pixel size, depth and grating pitch are 3 μm×7.5 μm, 150 μm and 3 μm, respectively. The microstructure of the scintillator has been examined microscopically and macroscopically by scanning electron microscope and x-ray resolution chart testing, respectively. The preliminary measurements have shown that the proposed scintillator, also functioning as an analyser grating, has been successfully designed and developed.

Keywords: scintillator screen pore arrays oxidation CsI(Tl) analyser grating

Received: 11 August 2010
Revised: 09 October 2010
Accepted manuscript online:

PACS:	29.40.Mc	(Scintillation detectors)
	07.85.Fv	(X- and γ-ray sources, mirrors, gratings, and detectors)
	87.57.cf	(Spatial resolution)

Fund: Project supported by the Major Program of the National Natural Science Foundation of China (Grant No. 60532090).

Cite this article:

Lei Yao-Hu(雷耀虎), Liu Xin(刘鑫), Guo Jin-Chuan(郭金川), Zhao Zhi-Gang(赵志刚), and Niu Han-Ben(牛憨笨) Development of x-ray scintillator functioning also as an analyser grating used in grating-based x-ray differential phase contrast imaging 2011 Chin. Phys. B 20 042901

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Development of x-ray scintillator functioning also as an analyser grating used in grating-based x-ray differential phase contrast imaging

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